Initial

2026-01-08 11:08:17 +01:00
commit fe882dc444
311 changed files with 511562 additions and 0 deletions
--- a/General/POUs/CLEANOUT.TcPOU
+++ b/General/POUs/CLEANOUT.TcPOU
@@ -0,0 +1,162 @@
+<?xml version="1.0" encoding="utf-8"?>
+<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
+  <POU Name="CLEANOUT" Id="{ce0061ae-e812-4a19-b385-951266a3cfdc}" SpecialFunc="None">
+    <Declaration><![CDATA[PROGRAM CLEANOUT
+VAR_INPUT
+	Scan			:	BOOL;
+	CleanOut		:	BOOL;
+	TargetStation	:	INT;
+	TargetCassette	:	INT;
+	TargetSlot		:	INT;
+END_VAR
+VAR_OUTPUT
+	TargetStations			:	ARRAY[0..12] 	OF STRING;
+	TargetStationsN			:	ARRAY[0..12] 	OF INT;
+	TargetCassettes			:	ARRAY[0..3] 	OF STRING;
+
+{IF defined (SO1635)}	
+	TargetCassettesMaxIndex	:	INT := 3;
+{END_IF}
+{IF defined (SO1636)}	
+	TargetCassettesMaxIndex	:	INT := 1;
+{END_IF}	
+	TargetCassettesMaxIndex	:	INT := 1;
+
+	TargetSlots				:	ARRAY[0..MaxNumberOfWafer-1] 	OF STRING;
+	NumberOfTargetStation	:	INT;
+
+	
+	ScanInvisible			:	BOOL;
+	SlotInvisible			:	BOOL;
+	CleanoutInvisible		:	BOOL;
+	CassetteInvisible		:	BOOL;
+END_VAR
+VAR
+	i						:	INT;
+	Step					:	INT;
+	
+	iTargetStation			:	INT;
+END_VAR
+]]></Declaration>
+    <Implementation>
+      <ST><![CDATA[NumberOfTargetStation 	:= 	0;
+CleanOutNeeded			:=	FALSE;
+ScanInvisible			:=	FALSE;
+SlotInvisible			:=	FALSE;
+CleanoutInvisible		:=	FALSE;
+CassetteInvisible		:=	FALSE;
+FOR	i:= FirstStation TO LastStation DO
+	CASE StationsStatus[i].StationType OF
+		noStationType, TypeGeneral, TypeMedia:
+			;
+		TypeCassette:
+			TargetCassettes[i-FirstCassette] 	:= 	StationsStatus[i].StationName;
+			IF StationsStatus[i].Ist.Busy THEN
+				ScanInvisible 	:= 	TRUE;
+				SlotInvisible	:=	TRUE;
+			END_IF
+		ELSE
+			IF  StationsStatus[i].OnlyMoveToStation THEN
+				CONTINUE;
+			END_IF
+			
+			IF StationsStatus[i].WaferInfo[0].Number = 100 THEN
+				TargetStations[NumberOfTargetStation] 	:= 	StationsStatus[i].StationName;
+				TargetStationsN[NumberOfTargetStation] 	:= 	i;
+				CleanOutNeeded							:=	TRUE;
+				NumberOfTargetStation 					:= 	NumberOfTargetStation +1;
+			END_IF
+			
+			IF StationsStatus[i].StationType = TypeRobot THEN
+				IF StationsStatus[i].WaferInfo[0].Number = 100 THEN
+					TargetStations[NumberOfTargetStation] 	:= 	StationsStatus[i].StationName;
+					TargetStationsN[NumberOfTargetStation] 	:= 	i;
+					CleanOutNeeded							:=	TRUE;
+					NumberOfTargetStation 					:= 	NumberOfTargetStation +1;
+				END_IF
+			
+				IF StationsStatus[i].Ist.Busy THEN
+					ScanInvisible 	:= 	TRUE;
+					SlotInvisible	:=	TRUE;
+				END_IF
+			END_IF
+	END_CASE
+END_FOR
+IF NOT CASSETTE_MAIN[TargetCassette + FirstCassette].IO.CarrierAvailable THEN
+	ScanInvisible := TRUE;
+END_IF
+
+
+IF StationsStatus[RobotStation].WaferInfo[0].Number <> 0 THEN
+	ScanInvisible := TRUE;
+END_IF
+IF TargetStationsN[TargetStation] = RobotStation THEN
+	CassetteInvisible := TRUE;
+END_IF
+
+IF StationsStatus[FirstCassette + TargetCassette].Ist.CloseIn THEN
+	FOR i := 0 TO MaxNumberOfWafer - 1 DO
+		IF CASSETTE_MAIN[FirstCassette + TargetCassette].Signal.Wafer[i+1].WaferStatus = noWafer THEN
+			TargetSlots[i] := INT_TO_STRING(i+1);
+		ELSE
+			TargetSlots[i] := CONCAT(INT_TO_STRING(i+1), ' (Not Available)');
+		END_IF
+	END_FOR
+ELSE
+	SlotInvisible		:=	TRUE;
+END_IF
+
+
+IF FIND(TargetSlots[TargetSlot], '(Not Available)') > 0 THEN
+	CleanoutInvisible := TRUE;
+END_IF
+
+IF SlotInvisible THEN
+	CleanoutInvisible := TRUE;
+END_IF
+
+
+CASE Step OF
+	0:
+		IF CleanOut THEN
+			Step := 10;
+		END_IF
+	10:
+		iTargetStation := TargetStationsN[TargetStation];
+		IF NOT StationsStatus[iTargetStation].Ist.Busy AND NOT StationsStatus[RobotStation].Ist.Busy THEN
+			ROBOT_MAIN.TargetStation 	:= iTargetStation;
+			CMD[RobotStation]			:= GetCMD;
+			Step := Step +1;
+		END_IF
+	11:
+		IF NOT StationsStatus[RobotStation].Ist.Busy THEN
+			Step := 30;
+		END_IF
+	20:
+		IF NOT StationsStatus[RobotStation].Ist.Busy THEN
+			ROBOT_MAIN.TargetStation 	:= 	TypeAligner;
+			CMD[RobotStation]			:= 	PutCMD;
+			Step 						:= 	Step +1;
+		END_IF
+	21:
+		IF NOT StationsStatus[RobotStation].Ist.Busy THEN
+			Step := 30;
+		END_IF
+	30:
+		IF NOT StationsStatus[RobotStation].Ist.Busy THEN
+			ROBOT_MAIN.TargetStation 														:= 	TypeCassette + TargetCassette;
+			ROBOT_MAIN.TargetSlot															:=	TargetSlot +1;
+			CASSETTE_MAIN[ROBOT_MAIN.TargetStation].Signal.Wafer[ROBOT_MAIN.TargetSlot].Defect	:=	TRUE;
+			CMD[RobotStation]			:= 	PutCMD;
+			Step 																			:= 	Step +1;
+		END_IF
+	31:
+		IF NOT StationsStatus[RobotStation].Ist.Busy THEN
+			CleanOut := FALSE;
+			Step := 0;
+		END_IF
+END_CASE
+]]></ST>
+    </Implementation>
+  </POU>
+</TcPlcObject>