Heisig_GmbH/infineon_legacy_plc
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This commit is contained in:
Matthias Heisig
2026-01-08 11:08:17 +01:00
commit fe882dc444
311 changed files with 511562 additions and 0 deletions
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176
PLC/1 Cassette/DUTs/Cassette_ErrorNr.TcTLEO Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
<EnumerationTextList Name="Cassette_ErrorNr" Id="{226a81f3-c400-4078-882c-8287768274b6}">
<Declaration><![CDATA[{attribute 'qualified_only'}
{attribute 'strict'}
TYPE Cassette_ErrorNr :(
eNoError := 0,
eNoWafer := 5,
eDoorLockTimeOut := 100,
eRecipeMissing := 110,
eTrayNoCom := 200,
eDoorIsOpened := 2000,
eInitError := 2001,
eGetError := 2002,
TrayLock1UpTimeout := 3000,
TrayLock1DownTimeout := 3001,
TrayLock2UpTimeout := 3100,
TrayLock2DownTimeout := 3101,
eDoor1CloseTimeout := 3500,
eDoor1LockTimeout := 3510
);
END_TYPE]]></Declaration>
<XmlArchive>
<Data>
<o xml:space="preserve" t="TextListEnumerationTextListObject">
<l n="TextList" t="ArrayList" cet="TextListRow">
<o>
<v n="TextID">"eNoError"</v>
<v n="TextDefault">"0"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"eNoWafer"</v>
<v n="TextDefault">"5"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"eDoorLockTimeOut"</v>
<v n="TextDefault">"100"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Door Lock Timeout</v>
<v>Door Lock Timeout</v>
</l>
</o>
<o>
<v n="TextID">"eRecipeMissing"</v>
<v n="TextDefault">"110"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>One of the recipes was not found</v>
<v>One of the recipes was not found</v>
</l>
</o>
<o>
<v n="TextID">"eTrayNoCom"</v>
<v n="TextDefault">"200"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>No Communication</v>
<v>Keine Kommunikation</v>
</l>
</o>
<o>
<v n="TextID">"eDoorIsOpened"</v>
<v n="TextDefault">"2000"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Door is opened</v>
<v>Tür ist geöffnet</v>
</l>
</o>
<o>
<v n="TextID">"eInitError"</v>
<v n="TextDefault">"2001"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>An error happened while Initialization</v>
<v>Fehler bei der Inistialisierung aufgetreten</v>
</l>
</o>
<o>
<v n="TextID">"eGetError"</v>
<v n="TextDefault">"2002"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>An error happened while Get Tray</v>
<v>An error happened while Get Tray</v>
</l>
</o>
<o>
<v n="TextID">"TrayLock1UpTimeout"</v>
<v n="TextDefault">"3000"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Tray Lock 1 Timeout</v>
<v>Tray Lock 1 Timeout</v>
</l>
</o>
<o>
<v n="TextID">"TrayLock1DownTimeout"</v>
<v n="TextDefault">"3001"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Tray Unlock 1 Timeout</v>
<v>Tray Unlock 1 Timeout</v>
</l>
</o>
<o>
<v n="TextID">"TrayLock2UpTimeout"</v>
<v n="TextDefault">"3100"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Tray Lock 2 Timeout</v>
<v>Tray Lock 2 Timeout</v>
</l>
</o>
<o>
<v n="TextID">"TrayLock2DownTimeout"</v>
<v n="TextDefault">"3101"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Tray Unlock 2 Timeout</v>
<v>Tray Unlock 2 Timeout</v>
</l>
</o>
<o>
<v n="TextID">"eDoor1CloseTimeout"</v>
<v n="TextDefault">"3500"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Door Close Timeout</v>
<v>Door Close Timeout</v>
</l>
</o>
<o>
<v n="TextID">"eDoor1LockTimeout"</v>
<v n="TextDefault">"3510"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Door Lock Timeout</v>
<v>Door Lock Timeout</v>
</l>
</o>
<o>
<v n="TextID">""</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
</l>
<l n="Languages" t="ArrayList" cet="String">
<v>en</v>
<v>de</v>
</l>
<v n="GuidInit">{cb09bdcc-ddce-4e20-a18d-e64c44b2eec7}</v>
<v n="GuidReInit">{03eff7bf-2edd-4179-a258-07b1f3aaf9bc}</v>
<v n="GuidExitX">{569a86de-5f8d-48b3-aa75-4f44c76aa875}</v>
</o>
</Data>
<TypeList>
<Type n="ArrayList">System.Collections.ArrayList</Type>
<Type n="Guid">System.Guid</Type>
<Type n="String">System.String</Type>
<Type n="TextListEnumerationTextListObject">{4b60233c-f940-4beb-b331-82133b520151}</Type>
<Type n="TextListRow">{53da1be7-ad25-47c3-b0e8-e26286dad2e0}</Type>
</TypeList>
</XmlArchive>
</EnumerationTextList>
</TcPlcObject>

12
PLC/1 Cassette/DUTs/Recipe/sCassetteRecipe.TcDUT Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.8">
<DUT Name="sCassetteRecipe" Id="{29cf92a2-ce23-429c-a82c-a9d7064645aa}">
<Declaration><![CDATA[TYPE sCassetteRecipe :
STRUCT
STEP_COUNT : USINT := 1;
DATA : ARRAY [1..maxRecipeSteps] OF sCassetteStepData;
END_STRUCT
END_TYPE
]]></Declaration>
</DUT>
</TcPlcObject>

16
PLC/1 Cassette/DUTs/Recipe/sCassetteStepData.TcDUT Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
<DUT Name="sCassetteStepData" Id="{8a08ab1f-0d13-4dba-964d-8d13401669b1}">
<Declaration><![CDATA[TYPE sCassetteStepData :
STRUCT
StationType : T_MaxString := 'Hotplate';
RecipeName : T_MaxString;
RetryFlowName : T_MaxString;
Retry : BOOL;
// Defect : BOOL;
Alternative : UDINT := 16#FFFF;
END_STRUCT
END_TYPE
]]></Declaration>
</DUT>
</TcPlcObject>

157
PLC/1 Cassette/DUTs/eCassetteMedienNamen.TcTLEO Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
<EnumerationTextList Name="eCassetteMedienNamen" Id="{b2ade8b1-3b11-4a07-9508-db9d94b8d5a8}">
<Declaration><![CDATA[{attribute 'qualified_only'}
{attribute 'strict'}
TYPE eCassetteMedienNamen :
(
enum_member := 0,
DoorLock,
FindSize,
FrontDMC,
TrayInit,
TrayNextSlot,
TrayLock1Up,
TrayLock1Down,
TrayLock2Up,
TrayLock2Down,
NIO_ToProduction,
NIO_ToUnload
);
END_TYPE
]]></Declaration>
<XmlArchive>
<Data>
<o xml:space="preserve" t="TextListEnumerationTextListObject">
<l n="TextList" t="ArrayList" cet="TextListRow">
<o>
<v n="TextID">"enum_member"</v>
<v n="TextDefault">"0"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"DoorLock"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"FindSize"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"FrontDMC"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"TrayInit"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"TrayNextSlot"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"TrayLock1Up"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"TrayLock1Down"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"TrayLock2Up"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"TrayLock2Down"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"NIO_ToProduction"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"NIO_ToUnload"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">""</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
</l>
<l n="Languages" t="ArrayList" cet="String">
<v>en</v>
<v>de</v>
</l>
<v n="GuidInit">{9d8831c3-6ebf-40aa-b49d-21a189d9a01c}</v>
<v n="GuidReInit">{8d23c652-15b3-4e96-9923-18f271640c3b}</v>
<v n="GuidExitX">{7062e6cc-3918-41b8-8244-b17081733e11}</v>
</o>
</Data>
<TypeList>
<Type n="ArrayList">System.Collections.ArrayList</Type>
<Type n="Guid">System.Guid</Type>
<Type n="String">System.String</Type>
<Type n="TextListEnumerationTextListObject">{4b60233c-f940-4beb-b331-82133b520151}</Type>
<Type n="TextListRow">{53da1be7-ad25-47c3-b0e8-e26286dad2e0}</Type>
</TypeList>
</XmlArchive>
</EnumerationTextList>
</TcPlcObject>

13
PLC/1 Cassette/DUTs/sCassetteConfig.TcDUT Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.8">
<DUT Name="sCassetteConfig" Id="{f635030e-c9bb-43a6-ad2a-b72a325fc6b0}">
<Declaration><![CDATA[TYPE sCassetteConfig :
STRUCT
// ReceiverCassette : BYTE;
TeachPosition : ARRAY [1..MaxNumberOfSizes] OF sTray;
ConfigPlausibility : BOOL;
END_STRUCT
END_TYPE
]]></Declaration>
</DUT>
</TcPlcObject>

14
PLC/1 Cassette/DUTs/sCassetteSignal.TcDUT Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.12">
<DUT Name="sCassetteSignal" Id="{c2aefa62-ddd1-42cf-ad2f-e019aaf21ced}">
<Declaration><![CDATA[TYPE sCassetteSignal :
STRUCT
Wafer : ARRAY[0..MaxNumberOfWafer]OF sWaferSignal;
START_TIME : T_MaxString;
LotID : T_MaxString;
WaitingForNIO : BOOL;
END_STRUCT
END_TYPE
]]></Declaration>
</DUT>
</TcPlcObject>

11
PLC/1 Cassette/DUTs/sTray.TcDUT Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
<DUT Name="sTray" Id="{e50a90e0-4d94-4f00-aec9-b322c3e47680}">
<Declaration><![CDATA[TYPE sTray :
STRUCT
Position : ARRAY[1..MaxNumberOfSubstratesPerTray] OF sTrayPositon;
END_STRUCT
END_TYPE
]]></Declaration>
</DUT>
</TcPlcObject>

12
PLC/1 Cassette/DUTs/sTrayPositon.TcDUT Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.13">
<DUT Name="sTrayPositon" Id="{c2835246-209b-419a-a9e5-fe1b90865aa4}">
<Declaration><![CDATA[TYPE sTrayPositon :
STRUCT
Camera : ARRAY[0..1] OF UINT;
// Robot : ARRAY[0..1] OF LREAL;
END_STRUCT
END_TYPE
]]></Declaration>
</DUT>
</TcPlcObject>

20
PLC/1 Cassette/DUTs/sWaferSignal.TcDUT Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.8">
<DUT Name="sWaferSignal" Id="{65a0bea5-7327-426e-9120-719f3678725e}">
<Declaration><![CDATA[TYPE sWaferSignal :
STRUCT
WaferStatus : eWaferStatus;
Defect : BOOL;
Invisible : BOOL := TRUE;
Color : DWORD := 16#FF808080;
Size : USINT;
WAFERNUMBER : T_MaxString;
// LOT_ID : T_MaxString;
// SLOT_ID : T_MaxString;
END_STRUCT
END_TYPE]]></Declaration>
</DUT>
</TcPlcObject>

44
PLC/1 Cassette/GVLs/CASSETTE_GVL.TcGVL Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.12">
<GVL Name="CASSETTE_GVL" Id="{2606fd17-32cf-4ab8-bc32-49981b682e6e}">
<Declaration><![CDATA[VAR_GLOBAL
CASSETTE_RECIPE_EDITE : sCassetteRecipe;
CASSETTE_RECIPE_EMPTY : sCassetteRecipe;
CASSETTE_MAIN : ARRAY[FirstCassette..LastCassette] OF CASSETTE_MAIN_FB;
bOutCassetteLockDoor AT %Q* : ARRAY[FirstCassette..LastCassette] OF BOOL := [(LastCassette-FirstCassette)(TRUE)];
VisuCassetteMain : REFERENCE TO CASSETTE_MAIN_FB := CASSETTE_MAIN[FirstCassette];
VisuCassetteSignal : REFERENCE TO sCassetteSignal := CASSETTE_MAIN[FirstCassette].Signal;
CurrentStepStationType : eStationType;
FlowRecipeSelectedTypeIndex : INT;
CurrentStepRecipeList : sRecipeList;
VisuCassetteMaxNumberOfRecipe : INT := 100;
FlowRecipeSellectedRecipe : INT;
FlowRecipeRetryRecipe : UINT;
DummyCassetteConfig : sCassetteConfig;
VisuCassetteConfig : REFERENCE TO sCassetteConfig := DummyCassetteConfig;
ScheduleRobotAligner : sScheduler;
ScheduleRobotNotOk : BOOL;
ScheduleStationNotOk : UDINT;
TrayFeederSendCounter : ARRAY[FirstCassette..LastCassette] OF BYTE;
TrayJob : sJob;
LastSizeFound : USINT;
CurrentCameraPosition : ARRAY[0..MaxNumberOfSubstratesPerTray-1] OF ARRAY[0..1] OF UINT;
END_VAR
]]></Declaration>
</GVL>
</TcPlcObject>

73
PLC/1 Cassette/JOB TRAY/DUTs/eJobType.TcTLEO Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.8">
<EnumerationTextList Name="eJobType" Id="{58e93e8f-be7f-4f67-8f0f-631b225bcaf6}">
<Declaration><![CDATA[{attribute 'qualified_only'}
{attribute 'strict'}
{attribute 'to_string'}
TYPE eJobType :
(
noJob := 0,
AllTrays,
TrayLot,
OneTray
);
END_TYPE
]]></Declaration>
<XmlArchive>
<Data>
<o xml:space="preserve" t="TextListEnumerationTextListObject">
<l n="TextList" t="ArrayList" cet="TextListRow">
<o>
<v n="TextID">"noJob"</v>
<v n="TextDefault">"0"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>No Job</v>
</l>
</o>
<o>
<v n="TextID">"AllTrays"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>All Trays</v>
</l>
</o>
<o>
<v n="TextID">"TrayLot"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Tray Lot</v>
</l>
</o>
<o>
<v n="TextID">"OneTray"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>One Tray</v>
</l>
</o>
<o>
<v n="TextID">""</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
</l>
</o>
</l>
<l n="Languages" t="ArrayList" cet="String">
<v>en</v>
</l>
<v n="GuidInit">{8dd1451a-7387-4d88-806e-cc45708dbe3b}</v>
<v n="GuidReInit">{a16b13d8-3366-447b-8b63-44240be0fa39}</v>
<v n="GuidExitX">{9d274fa3-dd92-42ce-a39d-7a2d1a826340}</v>
</o>
</Data>
<TypeList>
<Type n="ArrayList">System.Collections.ArrayList</Type>
<Type n="Guid">System.Guid</Type>
<Type n="String">System.String</Type>
<Type n="TextListEnumerationTextListObject">{4b60233c-f940-4beb-b331-82133b520151}</Type>
<Type n="TextListRow">{53da1be7-ad25-47c3-b0e8-e26286dad2e0}</Type>
</TypeList>
</XmlArchive>
</EnumerationTextList>
</TcPlcObject>

17
PLC/1 Cassette/JOB TRAY/DUTs/sJob.TcDUT Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.8">
<DUT Name="sJob" Id="{4112e3dc-05fa-4403-b0ab-7042aa91760a}">
<Declaration><![CDATA[TYPE sJob :
STRUCT
JobType : eJobType;
FlowName : INT;
TryIndex : USINT := 1;
Start : BOOL;
StartTrayIndex : USINT := 1;
EndTrayIndex : USINT := 1;
END_STRUCT
END_TYPE
]]></Declaration>
</DUT>
</TcPlcObject>

145
PLC/1 Cassette/JOB TRAY/JOB.TcPOU Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.13">
<POU Name="JOB" Id="{799f177c-bbc6-4aa2-ab23-128c570a7c41}" SpecialFunc="None">
<Declaration><![CDATA[PROGRAM JOB
VAR
Step : INT;
// NextIndexDone : ARRAY[FirstCassette..FirstCassette +1] OF BOOL;
i : INT;
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[IF StationsStatus[FirstCassette].Soll.Stop THEN
Step := 0;
TrayJob.Start := FALSE;
TrayBatch(0,0);
RETURN;
END_IF
CASE Step OF
0:
IF TrayJob.Start THEN
Step := 10;
END_IF
10:
CASE TrayJob.JobType OF
eJobType.OneTray:
IF TrayBatch(TrayJob.TryIndex,TrayJob.TryIndex) THEN
Step := 0;
END_IF
eJobType.AllTrays:
IF TrayBatch(1,20) THEN
Step := 0;
END_IF
eJobType.TrayLot:
IF TrayBatch(TrayJob.StartTrayIndex,TrayJob.EndTrayIndex) THEN
Step := 0;
END_IF
END_CASE
END_CASE]]></ST>
</Implementation>
<Method Name="TrayBatch" Id="{7fdb400e-fd56-4c2a-8bbf-660c477fc1af}">
<Declaration><![CDATA[METHOD TrayBatch : BOOL
VAR_INPUT
FirstTray : USINT;
LastTray : USINT;
END_VAR
VAR_INST
Step : INT;
TrayIndex : USINT;
i : INT;
ForLoopFrom : INT;
ForLoopTo : INT;
// NextIndexDone : ARRAY[FirstCassette..FirstCassette +1] OF BOOL;
END_VAR
VAR
bError : BOOL;
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[IF StationsStatus[FirstCassette].Soll.Stop THEN
Step := 0;
RETURN;
END_IF
CASE Step OF
0:
IF StationsStatus[FirstCassette].Ist.InitDone AND
NOT StationsStatus[FirstCassette].Ist.Busy AND
StationsStatus[FirstCassette+1].Ist.InitDone AND
NOT StationsStatus[FirstCassette+1].Ist.Busy THEN
//NextIndexDone[FirstCassette] := FALSE;
//NextIndexDone[FirstCassette+1] := FALSE;
TrayIndex := FirstTray;
Step := 10;
END_IF
10:
IF CASSETTE_MAIN[FirstCassette].TrayFeeder.GetTray(SlotNr := TrayIndex, bOutError => bError) THEN
IF bError THEN
Step := Step +1;
ELSE
Step := 20;
END_IF
END_IF
20:
StationsStatus[FirstCassette].SellectedRecipeAutomatic := TrayJob.FlowName;
IF NOT StationsStatus[FirstCassette].Ist.Busy THEN
CMD[FirstCassette] := CloseInCMD;
StationsStatus[FirstCassette].Soll.AutoStart := TRUE;
Step := Step +1;
END_IF
21:
IF CASSETTE_MAIN[FirstCassette].TrayFeeder.TrayNumber > 0 THEN
ForLoopFrom := 1+ (CASSETTE_MAIN[FirstCassette].TrayFeeder.TrayNumber)*100;
ForLoopTo := 100+ (CASSETTE_MAIN[FirstCassette].TrayFeeder.TrayNumber)*100;
FOR i := 1 TO ForLoopTo DO
IF CASSETTE_MAIN[FirstCassette].Signal.Wafer[i].WaferStatus = WaferForProccess THEN
IF NOT StationsStatus[FirstCassette].Ist.Busy THEN
CMD[FirstCassette] := CloseInCMD;
StationsStatus[FirstCassette].Soll.AutoStart := TRUE;
END_IF
RETURN;
END_IF
END_FOR
Step := 30;
END_IF
30:
IF bEmpty THEN
Step := 35;
RETURN;
END_IF
IF TrayIndex < LastTray THEN
TrayIndex := TrayIndex + 1;
Step := Step +1;
ELSE
Step := 35;
END_IF
31:
IF CASSETTE_MAIN[FirstCassette].TrayFeeder.GetTray(
SlotNr := TrayIndex,
bOutError => bError) THEN
Step := 21;
END_IF
35:
IF CASSETTE_MAIN[FirstCassette].TrayFeeder.EndOfLot() THEN
Step := Step +1;
END_IF
36:
IF NOT StationsStatus[FirstCassette].Ist.Busy THEN
Step := 40;
END_IF
40:
IF CASSETTE_MAIN[FirstCassette+1].TrayFeeder.EndOfLot() THEN
Step := 50;
END_IF
50:
TrayJob.Start := FALSE;
TrayBatch := TRUE;
Step := 0;
END_CASE]]></ST>
</Implementation>
</Method>
</POU>
</TcPlcObject>

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PLC/1 Cassette/JOB TRAY/VISU_JOB.TcVIS Normal file
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720
PLC/1 Cassette/JOB TRAY/VISU_JOB_ALL.TcVIS Normal file
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@@ -0,0 +1,720 @@
<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
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<?xml version="1.0" encoding="utf-8"?>
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<v n="GeneratedGlobalVisuVarsGuid">{8a97612d-492d-448a-b589-1c712b0696e2}</v>
<v n="GeneratedGlobalTheVisuVarlistGuid">{2f75bcd5-efa0-4777-b8fa-f429a1f783df}</v>
<v n="GeneratedGlobalVisuConstants">{f70295ba-4ec2-4cce-9559-beef1e8e1e1e}</v>
<d n="GeneratedAllElementsEntries" t="Hashtable" />
<o n="VisuRegDesc" t="GenericFbDescription">
<d n="FbMethods" t="CaseInsensitiveHashtable" ckt="String" cvt="Guid">
<v>FB_Exit</v>
<v>98727d31-8bbc-4f8d-8efd-64e461cb32b1</v>
<v>FB_Init</v>
<v>0d7149c5-4b30-470b-8e8e-aea6f0bd003c</v>
<v>FB_Reinit</v>
<v>ae24ba15-f586-4cd6-b8e4-aca6b501599f</v>
</d>
<d n="FbProperties" t="CaseInsensitiveHashtable" />
<v n="FbName">"NotImportant"</v>
<v n="FbGuid">{136f1476-dbbe-44ee-ba21-b9e122900df3}</v>
</o>
<v n="VisuRegisterGvl">{0bf61a76-4926-4bbe-bf2c-0565ec5b9591}</v>
<n n="SettingsPou" />
<n n="MemManPou" />
<o n="InputsPou" t="GenericFbDescription">
<d n="FbMethods" t="CaseInsensitiveHashtable" ckt="String" cvt="Guid">
<v>abstrGetDefaultCursor</v>
<v>c7be6997-2a7e-4ad3-a1b7-2616295d1440</v>
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</o>
<v n="DialogDut">{60142105-2a8d-44f6-b3d3-13c48863e450}</v>
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<v n="LastUsedIdForIdentifier">1</v>
<o n="TextDocument" t="TextDocument">
<v n="TextBlobForSerialisation">"VAR_IN_OUT
END_VAR"</v>
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</o>
<v n="GvlCreated">false</v>
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<v n="ProfileCompatibilityId">4140216668L</v>
<v n="LMVerMinor">0</v>
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</o>
<o n="VisuSizeManager" t="VisualObjectSizeManager">
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<v>0</v>
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<v n="IsStartVisu">false</v>
<v n="VisuSizeMode" t="VisualVisuSizeMode">AutoDetect</v>
<v n="Internal">false</v>
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</TypeList>
</XmlArchive>
</ObjectProperties>
</Visu>
</TcPlcObject>

932
PLC/1 Cassette/JOB TRAY/VISU_JOB_SINGLE.TcVIS Normal file
View File

@@ -0,0 +1,932 @@
<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
<Visu Name="VISU_JOB_SINGLE" Id="{978eef71-15d4-4a12-8b1c-e8311ff757c7}">
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@@ -0,0 +1,91 @@
<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
<POU Name="CASSETTE_IO_FB" Id="{f9ad0b2b-7197-4fd8-acd3-0022e65b08f6}" SpecialFunc="None">
<Declaration><![CDATA[FUNCTION_BLOCK CASSETTE_IO_FB EXTENDS Station_GENERAL_IO_FB
VAR_INPUT
CarrierAvailable : BOOL := TRUE;
TrayLock : ARRAY[1..2] OF PneumaticCylinder_FB;
DoorLock : Lock_FB;
END_VAR
VAR_OUTPUT
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[CASE iStation OF
LastCassette:
TrayLock[1]();
TrayLock[2]();
DoorLock();
END_CASE]]></ST>
</Implementation>
<Method Name="Initialization" Id="{e031683a-b05e-468f-8639-835f16bd7b1c}">
<Declaration><![CDATA[METHOD Initialization : BOOL
VAR_INPUT
iStation : INT;
END_VAR
VAR
ServiceNameUp : ARRAY[0..NumberOfLanguages] OF T_MaxString;
ServiceNameDown : ARRAY[0..NumberOfLanguages] OF T_MaxString;
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[InitializationExt(iStation);
CASE iStation OF
LastCassette:
iMediaArray[eCassetteMedienNamen.TrayInit].Invisible := TRUE;
iMediaArray[eCassetteMedienNamen.TrayNextSlot].Invisible := TRUE;
iMediaArray[eCassetteMedienNamen.FindSize].Invisible := TRUE;
ServiceNameUp[0] := 'Tray 45°$NLock';
ServiceNameDown[0] := 'Tray 45°$NUnlock';
TrayLock[1].Initialization(
iStation,
eCassetteMedienNamen.TrayLock1Up,
eCassetteMedienNamen.TrayLock1Down,
Cassette_ErrorNr.TrayLock1UpTimeout,
ServiceNameUp,
ServiceNameDown
);
ServiceNameUp[0] := 'Tray 90°$NLock';
ServiceNameDown[0] := 'Tray 90°$NUnlock';
TrayLock[2].Initialization(
iStation,
eCassetteMedienNamen.TrayLock2Up,
eCassetteMedienNamen.TrayLock2Down,
Cassette_ErrorNr.TrayLock2UpTimeout,
ServiceNameUp,
ServiceNameDown
);
ServiceNameUp[0] := 'Tray Lock';
DoorLock.Initialization(
iStation,
eCassetteMedienNamen.DoorLock,
Cassette_ErrorNr.eDoor1CloseTimeout,
Cassette_ErrorNr.eDoor1LockTimeout,
ServiceNameUp
);
ELSE
iMediaArray[eCassetteMedienNamen.TrayLock1Up].Invisible := TRUE;
iMediaArray[eCassetteMedienNamen.TrayLock1Down].Invisible := TRUE;
iMediaArray[eCassetteMedienNamen.TrayLock2Up].Invisible := TRUE;
iMediaArray[eCassetteMedienNamen.TrayLock2Down].Invisible := TRUE;
END_CASE
CASE iStation OF
11:
iMediaArray[eCassetteMedienNamen.FindSize].Invisible := TRUE;
END_CASE]]></ST>
</Implementation>
</Method>
</POU>
</TcPlcObject>

1118
PLC/1 Cassette/POUs/CASSETTE_MAIN_FB.TcPOU Normal file
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29
PLC/1 Cassette/POUs/CheckRecipeForFlow.TcPOU Normal file
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@@ -0,0 +1,29 @@
<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
<POU Name="CheckRecipeForFlow" Id="{49d63b5e-c859-4b4e-aa90-93579f23246e}" SpecialFunc="None">
<Declaration><![CDATA[FUNCTION CheckRecipeForFlow : BOOL
VAR_INPUT
Data : sCassetteStepData;
END_VAR
VAR
i : INT;
RecipeList : sRecipeList;
END_VAR
]]></Declaration>
<Implementation>
<ST><![CDATA[IF StationsStatus[RecipeGetStationType(Data.StationType)].NoRecipe THEN
CheckRecipeForFlow := TRUE;
RETURN;
END_IF
CheckRecipeForFlow := FALSE;
RecipeList := StationsStatus[RecipeGetStationType(Data.StationType)].IRecipe.GetProcessList;
FOR i := 1 TO RecipeList.NumberOfRecipe DO
IF Data.RecipeName = RecipeList.RecipeList[i] THEN
CheckRecipeForFlow := TRUE;
RETURN;
END_IF
END_FOR]]></ST>
</Implementation>
</POU>
</TcPlcObject>

471
PLC/1 Cassette/TrayFeeder/Substrate/Substrate_120.TcVIS Normal file
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@@ -0,0 +1,471 @@
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472
PLC/1 Cassette/TrayFeeder/Substrate/Substrate_80.TcVIS Normal file
View File

@@ -0,0 +1,472 @@
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PLC/1 Cassette/TrayFeeder/Substrate/VISU_CASSETTE_MAIN_Empty.TcVIS Normal file
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<?xml version="1.0" encoding="utf-8"?>
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514
PLC/1 Cassette/TrayFeeder/TrayFeeder_FB.TcPOU Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.13">
<POU Name="TrayFeeder_FB" Id="{c4598a14-3f38-4791-b276-94ad8d96874e}" SpecialFunc="None">
<Declaration><![CDATA[FUNCTION_BLOCK TrayFeeder_FB EXTENDS Peripherie_FB
VAR_INPUT
bInNextSlot : BOOL;
rInTargetSlot : USINT;
AllWafer : REFERENCE TO ARRAY[0..MaxNumberOfWafer]OF sWaferSignal;
END_VAR
VAR_OUTPUT
TrayNumber : BYTE;
EOT : BOOL;
END_VAR
VAR
Com : TCPClient_FB;
ReceiveArray : ARRAY [0..100] OF T_MaxString;
ReceiveMessage : T_MaxString;
ComTimeDelay : TON;
FindPosition : INT;
CMD_LOGGER : CMD_LOGGER_FB;
_Size : USINT;
END_VAR
VAR CONSTANT
tEnableTimeOut : TIME := T#3S;
step_abort : INT := 110;
NewLine : STRING := '$R$N';
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[IF iStationStatus.Soll.Stop THEN
Init();
GetTray();
// IndexNext();
EndOfLot();
SCAN();
END_IF
Com();
ErrorHandling();
CMD_LOGGER();
ComTimeDelay(IN := InAktorspannung, PT := T#3S);
AlarmSend(iStation, Cassette_ErrorNr.eTrayNoCom, FALSE, eReportType.Warning, sAvailableResponse.NoResponse, Com.bOutConnected OR NOT ComTimeDelay.Q);
FindPosition := Find(Com.ReceiveMessage, NewLine);
IF FindPosition > 0 THEN
ReceiveMessage := Left(Com.ReceiveMessage, FindPosition+1);
Com.ReceiveMessage := DELETE(Com.ReceiveMessage, FindPosition+1,1);
JMP Lable1;
END_IF
Lable1:
IF FIND(ReceiveMessage, CONCAT(ReceiveArray[0], NewLine)) =0 AND ReceiveMessage <> '' THEN
MEMMOVE(ADR(ReceiveArray[1]), ADR(ReceiveArray[0]), SIZEOF(ReceiveArray)- SIZEOF(ReceiveArray[0]));
ReceiveArray[0] := ReceiveMessage;
END_IF
FindPosition := find(ReceiveArray[0], NewLine);
IF FindPosition > 0 AND ReceiveArray[0] <> NewLine THEN
ReceiveArray[0] := LEFT(ReceiveArray[0], FindPosition-1);
END_IF
IF bInInit THEN
IF Init() THEN
bInInit := FALSE;
END_IF
END_IF
MediaArray[iStation][eCassetteMedienNamen.TrayNextSlot].Disable := NOT iStationStatus.Ist.InitDone OR rInTargetSlot = 0;
IF bInNextSlot THEN
IF GetTray(rInTargetSlot) THEN
bInNextSlot := FALSE;
END_IF
END_IF
]]></ST>
</Implementation>
<Method Name="EndOfLot" Id="{78817bce-5252-4fac-aff3-48994c677093}">
<Declaration><![CDATA[METHOD EndOfLot : BOOL
VAR_INPUT
END_VAR
VAR_INST
Step : INT;
END_VAR
]]></Declaration>
<Implementation>
<ST><![CDATA[IF iStationStatus.Soll.Stop THEN
Step := 0;
RETURN;
END_IF
(*CASE iStation OF
10:
TrayNumber := 0;
EndOfLot := TRUE;
Step := 0;
RETURN;
END_CASE*)
IF Error THEN
RETURN;
END_IF
CASE Step OF
0:
TrayNumber := 0;
Com.SendMessage := 'e$R';
Step := Step +1;
1:
IF find(ReceiveMessage,'Error')> 0 THEN
error_index := AlarmSend(iStation,MsgId := Cassette_ErrorNr.eGetError,TRUE, eReportType.Error, sAvailableResponse.RetryCancel, FALSE);
Step := 20;
Error := TRUE;
ELSIF ReceiveMessage = 'AtBottom$R$N' THEN
EndOfLot := TRUE;
Step := 0;
END_IF
20:
Com.SendMessage := 'r$R';
Step := Step +1;
21:
IF ReceiveMessage = 'Reset$R$N' THEN //Feeder Ok
Step := Step +1;
END_IF
22:
IF ReceiveMessage = 'Ready$R$N' THEN //Feeder Ok
Step := 0;
END_IF
END_CASE]]></ST>
</Implementation>
</Method>
<Method Name="GetTray" Id="{1b3bfcbd-547c-4348-add2-962aca2bf70b}">
<Declaration><![CDATA[METHOD GetTray : BOOL
VAR_INPUT
SlotNr : USINT := 0;
END_VAR
VAR_OUTPUT
bOutError : BOOL;
END_VAR
VAR_INST
Step : INT;
MAP : ARRAY [1..MaxNumberOfSubstratesPerTray] OF BYTE;
MaxNumberOfSlots : SINT;
i : INT;
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[IF iStationStatus.Soll.Stop THEN
bInNextSlot := FALSE;
Step := 0;
RETURN;
END_IF
(*CASE iStation OF
10:
IF Step < 10 THEN
Step := 10;
TrayNumber := 1;
END_IF
END_CASE*)
IF Error THEN
RETURN;
END_IF
CASE Step OF
0:
CASE SlotNr OF
0:
Com.SendMessage := 'f$R';
ELSE
fbFormatString(
sFormat := 'f%d$R',
arg1 := F_USINT(SlotNr),
sOut => Com.SendMessage
);
END_CASE
TrayNumber := 0;
Step := Step +1;
1:
IF ReceiveMessage = 'Index Fast$R$N' THEN
Step := Step +1;
END_IF
2:
IF ReceiveMessage = 'Ready$R$N' THEN
Step := Step +1;
ELSIF find(ReceiveMessage,'Error')> 0 THEN
error_index := AlarmSend(iStation,MsgId := Cassette_ErrorNr.eGetError,TRUE, eReportType.Error, sAvailableResponse.RetryCancel, FALSE);
Step := 20;
Error := TRUE;
ELSIF ReceiveMessage = 'AtBottom$R$N' THEN
EOT := TRUE;
TrayNumber := 0;
Step := 0;
bOutError := TRUE;
GetTray := TRUE;
END_IF
3:
Com.SendMessage := 't$R';
Step := Step +1;
4:
IF find(ReceiveMessage , 'Ready ')> 0 THEN
TrayNumber := STRING_TO_BYTE(MID(ReceiveMessage, 2, 7));
IF TrayNumber <> SlotNr AND SlotNr = 0 THEN
Step := 20;
ELSE
Step := 10;
END_IF
END_IF
10:
IF SCAN(TrayNumber) THEN
Step := 100;
END_IF
20:
Com.SendMessage := 'r$R';
Step := Step +1;
21:
IF ReceiveMessage = 'Reset$R$N' THEN //Feeder Ok
Step := Step +1;
END_IF
22:
IF ReceiveMessage = 'Ready$R$N' THEN //Feeder Ok
Step := 0;
END_IF
100:
GetTray := TRUE;
Step := 0;
END_CASE]]></ST>
</Implementation>
</Method>
<Method Name="IndexNext" Id="{917b69f2-35a5-4226-a03d-eaf6c67cc259}">
<Declaration><![CDATA[METHOD IndexNext : BOOL
VAR_INPUT
SlotNr : USINT := 0;
END_VAR
VAR_INST
Step : INT;
Size : USINT;
MAP : ARRAY [1..MaxNumberOfWafer] OF BYTE;
MaxNumberOfSlots : SINT;
i : INT;
END_VAR
]]></Declaration>
<Implementation>
<ST><![CDATA[IF iStationStatus.Soll.Stop THEN
bInNextSlot := FALSE;
Step := 0;
RETURN;
END_IF
CASE Step OF
0:
CASE SlotNr OF
0:
Com.SendMessage := 'f$R';
ELSE
fbFormatString(
sFormat := 'f%d$R',
arg1 := F_USINT(SlotNr),
sOut => Com.SendMessage
);
END_CASE
TrayNumber := 0;
Step := Step +1;
1:
IF ReceiveMessage = 'Index Fast$R$N' THEN
Step := Step +1;
END_IF
2:
IF ReceiveMessage = 'Ready$R$N' THEN
Step := Step +1;
END_IF
IF ReceiveMessage = 'AtBottom$R$N' THEN
EOT := TRUE;
TrayNumber := 0;
Step := 0;
END_IF
3:
Com.SendMessage := 't$R';
Step := Step +1;
4:
IF find(ReceiveMessage , 'Ready ')> 0 THEN
TrayNumber := STRING_TO_BYTE(MID(ReceiveMessage, 2, 7));
Step := 10;
END_IF
10:
CASE iStation OF
10:
IF KeyenceCamera.SizeDetection(Out=>Size) THEN
Step := 20;
END_IF
ELSE
Step := 100;
END_CASE
20:
MaxNumberOfSlots := ROBOT_MAIN.Config.ConfigKUKA.StationsTrayScan[iStation][Size].MaxNumber;
IF KeyenceCamera.Mapping(Size := Size, MaxNumberOfSlots := MaxNumberOfSlots, Out := MAP) THEN
Step := 30;
END_IF
30:
// FOR i := 1 TO MaxNumberOfSlots DO
FOR i := 1 TO MaxNumberOfSlots DO
CASE MAP[i] OF
0:
CASSETTE_MAIN[iStation].Signal.Wafer[i+(TrayNumber-1)*100].WaferStatus := noWafer;
1:
CASSETTE_MAIN[iStation].Signal.Wafer[i+(TrayNumber-1)*100].WaferStatus := WaferForProccess;
CASSETTE_MAIN[iStation].Signal.Wafer[i+(TrayNumber-1)*100].Size := Size;
ELSE
CASSETTE_MAIN[iStation].Signal.Wafer[i+(TrayNumber-1)*100].WaferStatus := WaferDefect;
END_CASE
END_FOR
// END_FOR
Step := 100;
100:
IndexNext := TRUE;
Step := 0;
END_CASE]]></ST>
</Implementation>
</Method>
<Method Name="Init" Id="{5c61d018-8396-4e36-bc22-559db2a85c23}">
<Declaration><![CDATA[METHOD Init : BOOL
VAR_INPUT
END_VAR
VAR_INST
Step : INT;
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[IF iStationStatus.Soll.Stop THEN
bInInit := FALSE;
Step := 0;
RETURN;
END_IF
(*CASE iStation OF
FirstCassette:
Step := 100;
END_CASE*)
IF Error THEN
RETURN;
END_IF
CASE Step OF
0:
bOutInitDone := FALSE;
Com.SendMessage := 'r$R';
Step := Step +1;
1:
IF ReceiveMessage = 'Reset$R$N' THEN //Feeder Ok
Step := 10;
END_IF
10:
IF find(ReceiveMessage, 'Error') > 0 THEN
error_index := AlarmSend(iStation,MsgId := Cassette_ErrorNr.eInitError,TRUE, eReportType.Error, sAvailableResponse.RetryCancel, FALSE);
Step := 0;
Error := TRUE;
END_IF
IF ReceiveMessage = 'Ok$R$N' THEN //Feeder Ok
DelayTimer(IN := FALSE);
Step := 20;
RETURN;
END_IF
IF ReceiveMessage = 'Door open$R$N' THEN
DelayTimer(IN := FALSE);
Error := TRUE;
error_index := AlarmSend(iStation:=iStation,MsgId := Cassette_ErrorNr.eDoorIsOpened,TRUE, eReportType.Error, sAvailableResponse.RetryCancel, FALSE);
Step := 0;
RETURN;
END_IF
DelayTimer(IN := TRUE, PT := T#3S);
IF DelayTimer.Q THEN
DelayTimer(IN := FALSE);
Com.SendMessage := '?$R';;
END_IF
20:
DelayTimer(IN := FALSE);
IF EndOfLot() THEN
Step := 100;
END_IF
100:
bOutInitDone := TRUE;
bInInit := FALSE;
Init := TRUE;
Step := 0;
END_CASE]]></ST>
</Implementation>
</Method>
<Method Name="Initialization" Id="{1a52974d-9b9d-4f6a-9471-528fee3f36aa}">
<Declaration><![CDATA[METHOD Initialization : BOOL
VAR_INPUT
iStation : INT;
IPAdress : T_IPv4Addr;
END_VAR
]]></Declaration>
<Implementation>
<ST><![CDATA[PeripherieInitialization(iStation);
Com.IPAdress := IPAdress;
Com.Port := 5000;
MediaArray[iStation][eCassetteMedienNamen.TrayInit].ServiceName[0] := 'Tray Feeder$NInitialization';
MediaArray[iStation][eCassetteMedienNamen.TrayInit].ServiceName[1] := 'Tray Feeder$NInitialisierung';
MediaArray[iStation][eCassetteMedienNamen.TrayInit].bReferenceControl REF= bInInit;
MediaArray[iStation][eCassetteMedienNamen.TrayInit].InputAvailable := TRUE;
MediaArray[iStation][eCassetteMedienNamen.TrayNextSlot].ServiceName[0] := 'Tray Feeder$NNext Slot';
MediaArray[iStation][eCassetteMedienNamen.TrayNextSlot].ServiceName[1] := 'Tray Feeder$NNächster Slot';
MediaArray[iStation][eCassetteMedienNamen.TrayNextSlot].bReferenceControl REF= bInNextSlot;
MediaArray[iStation][eCassetteMedienNamen.TrayNextSlot].InputAvailable := TRUE;
CMD_LOGGER.LogPath := CONCAT('D:\Obducat\LOG_CMD\', iStationStatus.StationName);
CMD_LOGGER.LogPath := CONCAT(CMD_LOGGER.LogPath, '\');
CMD_LOGGER.LogString REF= ReceiveArray[0];
]]></ST>
</Implementation>
</Method>
<Method Name="SCAN" Id="{5c614fc8-adf9-4537-b41a-2096fd053a28}">
<Declaration><![CDATA[METHOD SCAN : BOOL
VAR_INPUT
TrayNumber : INT := 0;
END_VAR
VAR_INST
Step : INT;
MAP : ARRAY [1..MaxNumberOfSubstratesPerTray] OF BYTE;
i : INT;
END_VAR
]]></Declaration>
<Implementation>
<ST><![CDATA[IF iStationStatus.Soll.Stop THEN
Step := 0;
RETURN;
END_IF
CASE Step OF
0:
FOR i := 1 TO MaxNumberOfSubstratesPerTray DO
AllWafer[TrayNumber*100+i].WaferStatus := noWafer;
END_FOR
CASE iStation OF
10:
IF KeyenceCamera.SizeDetection(Out=>_Size) THEN
Step := 20;
END_IF
ELSE
Step := 100;
END_CASE
20:
IF _Size > 0 THEN
LastSizeFound := _Size;
iStationStatus.WaferInfo[0].Size := _Size;
IF KeyenceCamera.Mapping(Size := _Size, Out := MAP) THEN
Step := 30;
END_IF
ELSE
Step := 100;
END_IF
30:
FOR i := 1 TO MaxNumberOfSubstratesPerTray DO
CASE MAP[i] OF
0:
AllWafer[i+TrayNumber*100].WaferStatus := noWafer;
1:
AllWafer[i+TrayNumber*100].WaferStatus := WaferForProccess;
AllWafer[i+TrayNumber*100].Size := _Size;
ELSE
AllWafer[i+TrayNumber*100].WaferStatus := WaferDefect;
END_CASE
END_FOR
Step := 0;
SCAN := TRUE;
100:
FOR i := 1 TO MaxNumberOfSubstratesPerTray DO
AllWafer[i+TrayNumber*100].WaferStatus := noWafer;
END_FOR
Step := 0;
SCAN := TRUE;
END_CASE]]></ST>
</Implementation>
</Method>
<Property Name="SubstrateGripperSize" Id="{f9a39544-3d12-4d88-a1ae-aa538a38c6ef}">
<Declaration><![CDATA[PROPERTY SubstrateGripperSize : USINT]]></Declaration>
<Get Name="Get" Id="{6a1aa3aa-3dba-47e3-b5ba-41dff6a68890}">
<Declaration><![CDATA[VAR
END_VAR
]]></Declaration>
<Implementation>
<ST><![CDATA[SubstrateGripperSize := ROBOT_MAIN.GetGripperSize(_Size);]]></ST>
</Implementation>
</Get>
</Property>
</POU>
</TcPlcObject>

715
PLC/1 Cassette/VISUs/Automatic/VISU_CASSETTE_AUTOMATIC.TcVIS Normal file
View File

@@ -0,0 +1,715 @@
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471
PLC/1 Cassette/VISUs/Recipe/VISU_CASSETTE_RECIPE_STEP_ALTERNATIVE.TcVIS Normal file
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<v>22d6d831-b0da-463d-a16c-c26aca7ecd55</v>
<v>GetDialogInterfaceSize</v>
<v>d6ab2003-088f-42fa-8d16-e402a8f1bd3e</v>
<v>GetElementArray</v>
<v>fdbe8076-adaf-43c7-8d1d-64c429eac3e7</v>
<v>GetElementIdArray</v>
<v>67d16572-2053-4088-b467-8f68ef6e8f0a</v>
<v>GetElementName</v>
<v>5419b838-2067-4900-92ed-006623651a32</v>
<v>GetInitializeVersion</v>
<v>62b4e9ed-bec2-4bea-b733-31c20f88c3ef</v>
<v>GetInstance</v>
<v>2ebe6361-f231-4e4e-b624-5b802fd958f7</v>
<v>GetLocalUsergroup</v>
<v>fea39dd0-f926-4a58-a313-bd1626c58035</v>
<v>GetName</v>
<v>8840fcd3-d88e-4cc6-96ac-6a331ebf6124</v>
<v>GetNamespace</v>
<v>3db69224-dacd-484d-8630-90ebb2bac542</v>
<v>GetResult</v>
<v>6ff10373-62df-479a-ab5c-764086601401</v>
<v>GetSize</v>
<v>dcb9b82c-fd78-4ef2-b395-9be4d5ad203b</v>
<v>GetSurroundingRect</v>
<v>1ed735db-a271-447b-acdd-103126913086</v>
<v>GetTabOrderIdArray</v>
<v>2fc9c1c2-d0c4-4098-83b2-163a3129b6ea</v>
<v>GetText</v>
<v>49f3160e-8277-4d0b-8187-9115821d68b3</v>
<v>GetTextProperties</v>
<v>5c267d7a-5bb8-4a99-ab4b-1d8c560baa4e</v>
<v>GetTooltip</v>
<v>49438b08-cfe1-4ff4-854d-69aaf47dac56</v>
<v>GetTranslator</v>
<v>a8d1d13f-40f5-42ad-bdbc-98033a8f0a73</v>
<v>GetUpdateRects</v>
<v>ccdc21b8-8012-4c41-89e1-93e325f8ce4b</v>
<v>HandleInput</v>
<v>c5a297e0-a267-4029-b444-5884dd535d94</v>
<v>HasInputAccess</v>
<v>c7e8ac49-a50b-4c47-b08a-fc28b8ce4762</v>
<v>HasInputAccessIntern</v>
<v>e75da350-c681-4df4-983d-0a106511ca76</v>
<v>HasVisibilityAccess</v>
<v>3df194a4-3a4b-4649-b022-60e6c2878a97</v>
<v>HasVisibilityAccessIntern</v>
<v>63ae1400-c0e8-4416-9966-eb874107c847</v>
<v>Initialize</v>
<v>ef3c190c-90eb-47ed-91e2-69a881a4a21f</v>
<v>IsAntialiasingInactive</v>
<v>8c5266e0-a5d0-46bc-8f04-65e7a0797e6d</v>
<v>Paint</v>
<v>8d63f5de-7d6d-44c2-93df-5a6adf86c140</v>
<v>SetClientData</v>
<v>f6ac5b08-3448-4d39-86ac-59d085c771a4</v>
<v>SetContainerSize</v>
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<v>SetDialogInterface</v>
<v>4484315e-4b46-45d4-af81-f1bba24231a0</v>
<v>SetResult</v>
<v>b43c0b02-726e-436d-b366-f9808733c4fb</v>
<v>SetStaticState</v>
<v>1ac86b1e-4384-499e-a5f3-faa96e092c3d</v>
<v>SetVisuFlagsInternal</v>
<v>8984bef5-8f09-4c79-90e8-7dff943ebdd8</v>
<v>Update</v>
<v>ed21d0fd-4300-4fda-a2a0-2ab0caf87796</v>
</d>
<d n="FbProperties" t="CaseInsensitiveHashtable" ckt="String" cvt="Guid">
<v>__getContainer</v>
<v>c5cc14aa-a42c-4dac-9e18-d3da5e981c42</v>
<v>__getVisu</v>
<v>4c374c5d-4ceb-4a29-a7e8-f3076be3cd94</v>
</d>
<v n="FbName">"NotImportant"</v>
<v n="FbGuid">{3ffc0961-36a7-4a08-b82a-8fbe516f2768}</v>
</o>
<v n="GeneratedGlobalVisuVarsGuid">{4d76d485-8568-45b9-bf3b-67356f0a1d87}</v>
<v n="GeneratedGlobalTheVisuVarlistGuid">{8ec2654d-fd4f-4a8b-91d3-2b0af8c7ce19}</v>
<v n="GeneratedGlobalVisuConstants">{4bc942f9-9e4d-4751-a3c1-1089e6771b6f}</v>
<d n="GeneratedAllElementsEntries" t="Hashtable" />
<o n="VisuRegDesc" t="GenericFbDescription">
<d n="FbMethods" t="CaseInsensitiveHashtable" ckt="String" cvt="Guid">
<v>FB_Exit</v>
<v>4da49571-45db-4cf4-aed5-e90faa476382</v>
<v>FB_Init</v>
<v>3a8fb3b1-a28c-4797-af26-eeb3126c686b</v>
<v>FB_Reinit</v>
<v>ca0f808a-1449-4d9e-af91-0b387969d569</v>
</d>
<d n="FbProperties" t="CaseInsensitiveHashtable" />
<v n="FbName">"NotImportant"</v>
<v n="FbGuid">{16d07f4d-3267-42d2-8177-00342e7ff581}</v>
</o>
<v n="VisuRegisterGvl">{0e696fe7-da9f-4bd0-a407-ec7bbba20a96}</v>
<n n="SettingsPou" />
<n n="MemManPou" />
<o n="InputsPou" t="GenericFbDescription">
<d n="FbMethods" t="CaseInsensitiveHashtable" ckt="String" cvt="Guid">
<v>abstrGetDefaultCursor</v>
<v>af37de10-55cd-4b4d-b5d5-4915d7086a46</v>
<v>ExecuteDialogClosed</v>
<v>989ba706-e375-47b1-be8c-747e0c4a9d3b</v>
<v>ExecuteKeyDown</v>
<v>6802af23-b8da-4575-9444-8962aafe85cc</v>
<v>ExecuteKeyUp</v>
<v>13fd6194-77fe-478c-af3b-15dc8c42499f</v>
<v>ExecuteLooseCapture</v>
<v>21064dc4-88c9-4248-ba8d-690fcbd42029</v>
<v>ExecuteMouseClick</v>
<v>9a3fd445-0eb5-475a-a0d2-7a764071789e</v>
<v>ExecuteMouseDblClick</v>
<v>f37bc612-d675-402d-bfe6-a54625a971a3</v>
<v>ExecuteMouseDown</v>
<v>77a38fdf-b7ca-477e-82c2-70bc1ddc2f63</v>
<v>ExecuteMouseEnter</v>
<v>e771753c-7235-4608-8111-7e5f367eca74</v>
<v>ExecuteMouseLeave</v>
<v>5a58ba54-59a7-42b0-8c75-f0f879b1c862</v>
<v>ExecuteMouseMove</v>
<v>c22aae44-2f51-4b0e-9e79-6b092b202414</v>
<v>ExecuteMouseUp</v>
<v>fc4d8f27-b729-4990-bf2e-12f02ed84806</v>
<v>ExecuteValueChanged</v>
<v>421066af-eead-43fb-bb8f-de29657ce953</v>
<v>GetElementInfo</v>
<v>b13352c7-13cc-49da-8bfe-392c24514716</v>
<v>Initialize</v>
<v>6e3543ba-3365-408a-b1d8-9e0a0dbe2041</v>
</d>
<d n="FbProperties" t="CaseInsensitiveHashtable" />
<v n="FbName">"NotImportant"</v>
<v n="FbGuid">{e512abde-358a-475e-bff8-af7333af39e2}</v>
</o>
<v n="DialogDut">{5715ebfa-3132-4086-b883-2a4ea1499fb4}</v>
</o>
<v n="LastUsedIdForIdentifier">2</v>
<o n="TextDocument" t="TextDocument">
<v n="TextBlobForSerialisation">"VAR_IN_OUT
END_VAR
VAR_INPUT
Nr : SINT;
END_VAR
VAR
Recipe : REFERENCE TO sCassetteRecipe := CASSETTE_RECIPE_EDITE;
CurrentStep : REFERENCE TO USINT := RecipeCurrentStep;
DummyBit : BOOL;
Value : UDINT;
END_VAR
(* or FlowRecipeAlternativeList[2] = 0*)"</v>
<n n="LineInfoPersistence" />
</o>
<v n="GvlCreated">false</v>
<n n="LMEntry" />
<v n="ProfileCompatibilityId">4140216668L</v>
<v n="LMVerMinor">0</v>
<v n="LMVerMajor">1</v>
<o n="Hotkeys" t="HotkeyConfiguration">
<v n="IdMin">481037385728L</v>
<v n="IdMax">549755813887L</v>
<v n="Id">481037385728L</v>
<v n="IdMask">549754765312L</v>
<v n="IdStep">1048576L</v>
<l2 n="Inputs" />
</o>
<o n="VisuSizeManager" t="VisualObjectSizeManager">
<d2 n="Size" ckt="Int32" cvt="VisualObjectSize">
<v>0</v>
<o>
<v n="Width">300</v>
<v n="Height">100</v>
</o>
<v>1</v>
<o>
<v n="Width">300</v>
<v n="Height">100</v>
</o>
<v>2</v>
<o>
<v n="Width">300</v>
<v n="Height">100</v>
</o>
</d2>
<v n="Version">2</v>
</o>
<o n="FrameInterfaceDataModel" t="HierarchicalProperties">
<l2 n="HierarchicalProperties" />
</o>
</o>
</Data>
<TypeList>
<Type n="ArrayList">System.Collections.ArrayList</Type>
<Type n="BackgroundSettings">{1038f12c-dd4b-4f96-87a3-a350fe8f3552}</Type>
<Type n="Boolean">System.Boolean</Type>
<Type n="Byte">System.Byte</Type>
<Type n="CaseInsensitiveHashtable">{7df88604-7ac5-4e36-91c4-55e4fdad3e68}</Type>
<Type n="ComplexInput">{1de566f6-72a7-494c-9353-9a418172c96e}</Type>
<Type n="Double">System.Double</Type>
<Type n="FontDescription">{896a5e54-96c3-433b-96d2-4f1442fef591}</Type>
<Type n="GeneratedLanguageModelEntriesData">{703465dc-4679-4ff2-bcc3-c57d0a204da3}</Type>
<Type n="GenericFbDescription">{40d6dd8d-dfd0-493a-8e29-c9a35e1e6539}</Type>
<Type n="GenericVisualElem">{f86c2928-8614-4cca-824b-e819ac4d58c4}</Type>
<Type n="Guid">System.Guid</Type>
<Type n="Hashtable">System.Collections.Hashtable</Type>
<Type n="HierarchicalProperties">{af53e824-e51f-4be1-b210-d001ef8efbd1}</Type>
<Type n="HotkeyConfiguration">{6b108d46-58af-4e41-a3f4-174d8f160cc4}</Type>
<Type n="Int16">System.Int16</Type>
<Type n="Int32">System.Int32</Type>
<Type n="Int64">System.Int64</Type>
<Type n="NamedStyleColor">{fa491db2-51ff-4bc1-9cd0-ce8c94ff6216}</Type>
<Type n="String">System.String</Type>
<Type n="STSnippetInputAction">{6302d3fe-6ea5-4c42-819a-a9734a133b3d}</Type>
<Type n="STSnippetInputAction[]">_3S.CoDeSys.VisualElem.STSnippetInputAction[], VisualElem.plugin, Version=4.6.0.0, Culture=neutral, PublicKeyToken=null</Type>
<Type n="TextDocument">{f3878285-8e4f-490b-bb1b-9acbb7eb04db}</Type>
<Type n="UInt16">System.UInt16</Type>
<Type n="UInt32">System.UInt32</Type>
<Type n="VisualElemCollection">{ef9d0b20-c96e-48db-b361-2ded4063150e}</Type>
<Type n="VisualElemList">{f285c9a3-7019-446b-b98c-ccec3a0af8fa}</Type>
<Type n="VisualElemMember">{c694e3a2-5c0b-4177-ab35-cb06bd5a6a02}</Type>
<Type n="VisualElemMemberCollection">{a4b83bea-3742-489c-9fe8-d96d68dba7ab}</Type>
<Type n="VisualElemMemberList">{17e26cd1-bb9b-47fe-a3d5-18fcd63b9c96}</Type>
<Type n="VisualObject">{f18bec89-9fef-401d-9953-2f11739a6808}</Type>
<Type n="VisualObjectSize">{6ad3e88f-aee2-4766-a7ea-a8790037ef51}</Type>
<Type n="VisualObjectSizeManager">{5f612b0e-b404-455f-8177-27864e9f5332}</Type>
</TypeList>
</XmlArchive>
<ObjectProperties>
<XmlArchive>
<Data>
<o xml:space="preserve" t="VisualProperty">
<v n="VisuUsageType">0</v>
<v n="SizeX">300</v>
<v n="SizeY">100</v>
<v n="IsStartVisu">false</v>
<v n="VisuSizeMode" t="VisualVisuSizeMode">Specified</v>
<v n="Internal">false</v>
<v n="DialogIsOpaque">false</v>
<v n="DialogIsOpaqueIsSet">false</v>
<v n="UseParentSizeProperties">false</v>
</o>
</Data>
<TypeList>
<Type n="Boolean">System.Boolean</Type>
<Type n="Int32">System.Int32</Type>
<Type n="VisualProperty">{477d844b-9b2a-407e-90a4-d36fd6dde2fc}</Type>
<Type n="VisualVisuSizeMode">{34718b76-91f6-43de-8c65-b77e0b1ee621}</Type>
</TypeList>
</XmlArchive>
</ObjectProperties>
</Visu>
</TcPlcObject>

4898
PLC/1 Cassette/VISUs/Service/VISU_CASSETTE_SERVICE.TcVIS Normal file
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