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This commit is contained in:
Matthias Heisig
2026-01-08 11:08:17 +01:00
commit fe882dc444
311 changed files with 511562 additions and 0 deletions
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176
PLC/1 Cassette/DUTs/Cassette_ErrorNr.TcTLEO Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
<EnumerationTextList Name="Cassette_ErrorNr" Id="{226a81f3-c400-4078-882c-8287768274b6}">
<Declaration><![CDATA[{attribute 'qualified_only'}
{attribute 'strict'}
TYPE Cassette_ErrorNr :(
eNoError := 0,
eNoWafer := 5,
eDoorLockTimeOut := 100,
eRecipeMissing := 110,
eTrayNoCom := 200,
eDoorIsOpened := 2000,
eInitError := 2001,
eGetError := 2002,
TrayLock1UpTimeout := 3000,
TrayLock1DownTimeout := 3001,
TrayLock2UpTimeout := 3100,
TrayLock2DownTimeout := 3101,
eDoor1CloseTimeout := 3500,
eDoor1LockTimeout := 3510
);
END_TYPE]]></Declaration>
<XmlArchive>
<Data>
<o xml:space="preserve" t="TextListEnumerationTextListObject">
<l n="TextList" t="ArrayList" cet="TextListRow">
<o>
<v n="TextID">"eNoError"</v>
<v n="TextDefault">"0"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"eNoWafer"</v>
<v n="TextDefault">"5"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"eDoorLockTimeOut"</v>
<v n="TextDefault">"100"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Door Lock Timeout</v>
<v>Door Lock Timeout</v>
</l>
</o>
<o>
<v n="TextID">"eRecipeMissing"</v>
<v n="TextDefault">"110"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>One of the recipes was not found</v>
<v>One of the recipes was not found</v>
</l>
</o>
<o>
<v n="TextID">"eTrayNoCom"</v>
<v n="TextDefault">"200"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>No Communication</v>
<v>Keine Kommunikation</v>
</l>
</o>
<o>
<v n="TextID">"eDoorIsOpened"</v>
<v n="TextDefault">"2000"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Door is opened</v>
<v>Tür ist geöffnet</v>
</l>
</o>
<o>
<v n="TextID">"eInitError"</v>
<v n="TextDefault">"2001"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>An error happened while Initialization</v>
<v>Fehler bei der Inistialisierung aufgetreten</v>
</l>
</o>
<o>
<v n="TextID">"eGetError"</v>
<v n="TextDefault">"2002"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>An error happened while Get Tray</v>
<v>An error happened while Get Tray</v>
</l>
</o>
<o>
<v n="TextID">"TrayLock1UpTimeout"</v>
<v n="TextDefault">"3000"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Tray Lock 1 Timeout</v>
<v>Tray Lock 1 Timeout</v>
</l>
</o>
<o>
<v n="TextID">"TrayLock1DownTimeout"</v>
<v n="TextDefault">"3001"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Tray Unlock 1 Timeout</v>
<v>Tray Unlock 1 Timeout</v>
</l>
</o>
<o>
<v n="TextID">"TrayLock2UpTimeout"</v>
<v n="TextDefault">"3100"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Tray Lock 2 Timeout</v>
<v>Tray Lock 2 Timeout</v>
</l>
</o>
<o>
<v n="TextID">"TrayLock2DownTimeout"</v>
<v n="TextDefault">"3101"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Tray Unlock 2 Timeout</v>
<v>Tray Unlock 2 Timeout</v>
</l>
</o>
<o>
<v n="TextID">"eDoor1CloseTimeout"</v>
<v n="TextDefault">"3500"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Door Close Timeout</v>
<v>Door Close Timeout</v>
</l>
</o>
<o>
<v n="TextID">"eDoor1LockTimeout"</v>
<v n="TextDefault">"3510"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v>Door Lock Timeout</v>
<v>Door Lock Timeout</v>
</l>
</o>
<o>
<v n="TextID">""</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
</l>
<l n="Languages" t="ArrayList" cet="String">
<v>en</v>
<v>de</v>
</l>
<v n="GuidInit">{cb09bdcc-ddce-4e20-a18d-e64c44b2eec7}</v>
<v n="GuidReInit">{03eff7bf-2edd-4179-a258-07b1f3aaf9bc}</v>
<v n="GuidExitX">{569a86de-5f8d-48b3-aa75-4f44c76aa875}</v>
</o>
</Data>
<TypeList>
<Type n="ArrayList">System.Collections.ArrayList</Type>
<Type n="Guid">System.Guid</Type>
<Type n="String">System.String</Type>
<Type n="TextListEnumerationTextListObject">{4b60233c-f940-4beb-b331-82133b520151}</Type>
<Type n="TextListRow">{53da1be7-ad25-47c3-b0e8-e26286dad2e0}</Type>
</TypeList>
</XmlArchive>
</EnumerationTextList>
</TcPlcObject>

12
PLC/1 Cassette/DUTs/Recipe/sCassetteRecipe.TcDUT Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.8">
<DUT Name="sCassetteRecipe" Id="{29cf92a2-ce23-429c-a82c-a9d7064645aa}">
<Declaration><![CDATA[TYPE sCassetteRecipe :
STRUCT
STEP_COUNT : USINT := 1;
DATA : ARRAY [1..maxRecipeSteps] OF sCassetteStepData;
END_STRUCT
END_TYPE
]]></Declaration>
</DUT>
</TcPlcObject>

16
PLC/1 Cassette/DUTs/Recipe/sCassetteStepData.TcDUT Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
<DUT Name="sCassetteStepData" Id="{8a08ab1f-0d13-4dba-964d-8d13401669b1}">
<Declaration><![CDATA[TYPE sCassetteStepData :
STRUCT
StationType : T_MaxString := 'Hotplate';
RecipeName : T_MaxString;
RetryFlowName : T_MaxString;
Retry : BOOL;
// Defect : BOOL;
Alternative : UDINT := 16#FFFF;
END_STRUCT
END_TYPE
]]></Declaration>
</DUT>
</TcPlcObject>

157
PLC/1 Cassette/DUTs/eCassetteMedienNamen.TcTLEO Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
<EnumerationTextList Name="eCassetteMedienNamen" Id="{b2ade8b1-3b11-4a07-9508-db9d94b8d5a8}">
<Declaration><![CDATA[{attribute 'qualified_only'}
{attribute 'strict'}
TYPE eCassetteMedienNamen :
(
enum_member := 0,
DoorLock,
FindSize,
FrontDMC,
TrayInit,
TrayNextSlot,
TrayLock1Up,
TrayLock1Down,
TrayLock2Up,
TrayLock2Down,
NIO_ToProduction,
NIO_ToUnload
);
END_TYPE
]]></Declaration>
<XmlArchive>
<Data>
<o xml:space="preserve" t="TextListEnumerationTextListObject">
<l n="TextList" t="ArrayList" cet="TextListRow">
<o>
<v n="TextID">"enum_member"</v>
<v n="TextDefault">"0"</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"DoorLock"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"FindSize"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"FrontDMC"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"TrayInit"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"TrayNextSlot"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"TrayLock1Up"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"TrayLock1Down"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"TrayLock2Up"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"TrayLock2Down"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"NIO_ToProduction"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">"NIO_ToUnload"</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
<o>
<v n="TextID">""</v>
<v n="TextDefault">""</v>
<l n="LanguageTexts" t="ArrayList" cet="String">
<v></v>
<v></v>
</l>
</o>
</l>
<l n="Languages" t="ArrayList" cet="String">
<v>en</v>
<v>de</v>
</l>
<v n="GuidInit">{9d8831c3-6ebf-40aa-b49d-21a189d9a01c}</v>
<v n="GuidReInit">{8d23c652-15b3-4e96-9923-18f271640c3b}</v>
<v n="GuidExitX">{7062e6cc-3918-41b8-8244-b17081733e11}</v>
</o>
</Data>
<TypeList>
<Type n="ArrayList">System.Collections.ArrayList</Type>
<Type n="Guid">System.Guid</Type>
<Type n="String">System.String</Type>
<Type n="TextListEnumerationTextListObject">{4b60233c-f940-4beb-b331-82133b520151}</Type>
<Type n="TextListRow">{53da1be7-ad25-47c3-b0e8-e26286dad2e0}</Type>
</TypeList>
</XmlArchive>
</EnumerationTextList>
</TcPlcObject>

13
PLC/1 Cassette/DUTs/sCassetteConfig.TcDUT Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.8">
<DUT Name="sCassetteConfig" Id="{f635030e-c9bb-43a6-ad2a-b72a325fc6b0}">
<Declaration><![CDATA[TYPE sCassetteConfig :
STRUCT
// ReceiverCassette : BYTE;
TeachPosition : ARRAY [1..MaxNumberOfSizes] OF sTray;
ConfigPlausibility : BOOL;
END_STRUCT
END_TYPE
]]></Declaration>
</DUT>
</TcPlcObject>

14
PLC/1 Cassette/DUTs/sCassetteSignal.TcDUT Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.12">
<DUT Name="sCassetteSignal" Id="{c2aefa62-ddd1-42cf-ad2f-e019aaf21ced}">
<Declaration><![CDATA[TYPE sCassetteSignal :
STRUCT
Wafer : ARRAY[0..MaxNumberOfWafer]OF sWaferSignal;
START_TIME : T_MaxString;
LotID : T_MaxString;
WaitingForNIO : BOOL;
END_STRUCT
END_TYPE
]]></Declaration>
</DUT>
</TcPlcObject>

11
PLC/1 Cassette/DUTs/sTray.TcDUT Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
<DUT Name="sTray" Id="{e50a90e0-4d94-4f00-aec9-b322c3e47680}">
<Declaration><![CDATA[TYPE sTray :
STRUCT
Position : ARRAY[1..MaxNumberOfSubstratesPerTray] OF sTrayPositon;
END_STRUCT
END_TYPE
]]></Declaration>
</DUT>
</TcPlcObject>

12
PLC/1 Cassette/DUTs/sTrayPositon.TcDUT Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.13">
<DUT Name="sTrayPositon" Id="{c2835246-209b-419a-a9e5-fe1b90865aa4}">
<Declaration><![CDATA[TYPE sTrayPositon :
STRUCT
Camera : ARRAY[0..1] OF UINT;
// Robot : ARRAY[0..1] OF LREAL;
END_STRUCT
END_TYPE
]]></Declaration>
</DUT>
</TcPlcObject>

20
PLC/1 Cassette/DUTs/sWaferSignal.TcDUT Normal file
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.8">
<DUT Name="sWaferSignal" Id="{65a0bea5-7327-426e-9120-719f3678725e}">
<Declaration><![CDATA[TYPE sWaferSignal :
STRUCT
WaferStatus : eWaferStatus;
Defect : BOOL;
Invisible : BOOL := TRUE;
Color : DWORD := 16#FF808080;
Size : USINT;
WAFERNUMBER : T_MaxString;
// LOT_ID : T_MaxString;
// SLOT_ID : T_MaxString;
END_STRUCT
END_TYPE]]></Declaration>
</DUT>
</TcPlcObject>