Initial

2026-01-08 11:08:17 +01:00
commit fe882dc444
311 changed files with 511562 additions and 0 deletions
--- a/Hotplate/POUs/HOTPLATE_MAIN_FB.TcPOU
+++ b/Hotplate/POUs/HOTPLATE_MAIN_FB.TcPOU
@@ -0,0 +1,388 @@
+<?xml version="1.0" encoding="utf-8"?>
+<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.12">
+  <POU Name="HOTPLATE_MAIN_FB" Id="{c78ec278-b64d-47fd-8edf-a8957521762d}" SpecialFunc="None">
+    <Declaration><![CDATA[FUNCTION_BLOCK HOTPLATE_MAIN_FB EXTENDS Station_GENERAL_MAIN_FB IMPLEMENTS I_STATION_CMD_CALL
+VAR
+	LastWaferSize		:	INT;
+	
+	Recipe				:	sHotplateRecipe;
+	RecipeLoad			:	sHotplateRecipe;
+	RecipeRead			:	sHotplateRecipe;
+	
+	ITempController		:	I_TempController;
+	Config				:	sHotplateConfig;
+	ConfigOld			:	sHotplateConfig;
+	
+	IO					:	HOTPLATE_IO_FB;
+END_VAR
+VAR CONSTANT
+	StepRecipeStart			:	INT :=	10;
+	StepEnd 				:	INT := 	30;
+END_VAR
+
+VAR PERSISTENT
+//	RecipeStandby			:	sHotplateRecipe;
+END_VAR
+
+]]></Declaration>
+    <Implementation>
+      <ST><![CDATA[]]></ST>
+    </Implementation>
+    <Folder Name="Start" Id="{4247ae12-9fcc-487a-9107-b49d8dda3a45}" />
+    <Method Name="CheckFlow" Id="{6e64097a-8642-404f-b16f-da3d4219c0e1}">
+      <Declaration><![CDATA[METHOD CheckFlow : BOOL
+VAR_INPUT
+	Step	:	REFERENCE TO INT;
+END_VAR
+VAR
+	i	:	USINT;
+END_VAR
+]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[CASE Step OF
+	0:
+		IF CheckRecipe() THEN
+			Step := 10;
+		END_IF
+	10:
+		ITempController.Enable 				:=	TRUE;
+		ITempController.TargetTemperature	:=	RecipeRead.TEMPERATURE;
+		ITempController.Tolerance			:=	RecipeRead.TOL;
+		Step := Step +1;
+	11:
+		IF  ITempController.TemperatureInRange() THEN
+			Step := 20;
+		ELSE
+			Step := 110;
+		END_IF
+	20:
+		Step := 100;
+	100:
+		iStationStatus.Ist.ReadyForFlow	:=	TRUE;
+		iStationStatus.Soll.CheckFlow	:=	FALSE;
+		Step	:=	0;
+	110:
+		iStationStatus.Ist.ReadyForFlow	:=	FALSE;
+		iStationStatus.Soll.CheckFlow	:=	FALSE;
+		Step	:=	0;
+END_CASE]]></ST>
+      </Implementation>
+    </Method>
+    <Method Name="CloseInOut" Id="{39f7b1c5-23cb-433f-b4a7-a51dba02cb4d}">
+      <Declaration><![CDATA[METHOD CloseInOut : BOOL
+VAR
+	PutFinished	:	INT;
+END_VAR
+]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[CASE _Step OF
+	0:
+		CASE iCMD OF
+			CloseInCMD:
+				IF iStationStatus.Ist.Service THEN
+					_Step := 50;
+				ELSE
+					_Step := 20;
+				END_IF
+			CloseOutCMD:
+				_Step := 50;
+		END_CASE
+	20:
+		IF LoadAutoRecipe() THEN
+			_Step := 30;
+		END_IF
+	30:
+		IF ITempController.TuneDone THEN
+			ITempController.TargetTemperature 		:=  Recipe.TEMPERATURE;
+			ITempController.Tolerance 				:=  Recipe.TOL;
+			ITempController.Enable 					:= 	TRUE;
+			_Step 									:= 	_Step +1;
+		ELSE
+			AlarmSend(iStation:=iStation,MsgId := HOTPLATE_ErrorNr.eNotTuned,TRUE, eReportType.Error, sAvailableResponse.Ok, FALSE);
+			iStationStatus.Soll.Stop := TRUE;
+		END_IF
+	31:
+		IF ITempController.TemperatureInRange(IO.rInCurrentTemperature) THEN
+			_Step := 50;
+		ELSE
+			iStationStatus.Error 		:= 	TRUE;
+			iStationStatus.ErrorIndex 	:= 	AlarmSend(iStation,MsgId := HOTPLATE_ErrorNr.wTempOutOfRange,TRUE, eReportType.Warning, sAvailableResponse.AbortRetryIgnore, FALSE);
+			iStationStatus.StepRetry		:=	0;
+			iStationStatus.StepIgnore 	:= 	50;
+		END_IF
+	50:
+		_Step := 0;
+		CloseInOut := TRUE;
+END_CASE
+]]></ST>
+      </Implementation>
+    </Method>
+    <Method Name="FB_Init" Id="{b968b8f2-f4f9-458c-8813-95ad7cbb84a1}">
+      <Declaration><![CDATA[//FB_Init is always available implicitly and it is used primarily for initialization.
+//The return value is not evaluated. For a specific influence, you can also declare the
+//methods explicitly and provide additional code there with the standard initialization
+//code. You can evaluate the return value.
+METHOD FB_Init: BOOL
+VAR_INPUT
+    bInitRetains: BOOL; // TRUE: the retain variables are initialized (reset warm / reset cold)
+    bInCopyCode: BOOL;  // TRUE: the instance will be copied to the copy code afterward (online change)   
+END_VAR]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[_DataLogger					:=	TRUE;
+_VisuName 					:=	'HOTPLATE';
+_SchedulerManagement		:=	TRUE;
+_PersistentProductCheck		:=	TRUE;]]></ST>
+      </Implementation>
+    </Method>
+    <Method Name="INIT" Id="{4952b82a-4af8-498c-b722-b63bbc5d8fac}">
+      <Declaration><![CDATA[METHOD INIT : BOOL
+]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[CASE _Step OF
+	0:
+		IF ITempController.TuneDone AND iStation = iStationStatus.StationType THEN
+			ITempController.Enable 				:= 	TRUE;
+			ITempController.TargetTemperature 	:= 	Config.StandbyTemperature;
+			ITempController.Tolerance			:=	1;		
+		END_IF
+		_Step := 100;
+	100:
+		iStationStatus.WaferInfo[0].Number := 0;
+		INIT := TRUE;
+		_Step := 0;
+END_CASE
+
+]]></ST>
+      </Implementation>
+    </Method>
+    <Method Name="Initialization" Id="{b32867f8-293a-4086-b86a-990b6cf2530c}">
+      <Declaration><![CDATA[METHOD Initialization : BOOL
+VAR_INPUT
+	iStation			:	INT;
+END_VAR
+VAR
+	Index				:	INT;
+	IndexString			:	STRING;
+END_VAR
+]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[
+InitializationExt(iStation);
+
+IO.Initialization(iStation);
+
+iStationStatus.NoScan 			:=	TRUE;
+iStationStatus.RecipeOnlyHeader	:=	TRUE;
+iStationStatus.NoProductCheck	:=	TRUE;
+_PersistentProductCheck			:=	TRUE;
+
+CASE StationsStatus[iStation].StationType OF
+	TypeHotplate:
+		iStationStatus.StandbyAvailable		:=	TRUE;
+		iStationStatus.StationName 	:= CONCAT('HP ', StationIndex);
+		RecipeStationName[iStation]	:= 'Hotplate';
+	TypeCoolplate:	
+		iStationStatus.StationName 	:= CONCAT('CP ', StationIndex);
+		RecipeStationName[iStation]	:= 'Coolplate';
+END_CASE
+
+iStationStatus.ErrorList				:=	'HOTPLATE_ErrorNr';
+
+CASE StationsStatus[iStation].StationType OF
+	TypeHotplate:
+		ConfigManagement.Initialization(ADR(Config), ADR(ConfigOld), SIZEOF(Config), 'sHotplateConfig', CONCAT('HP', StationIndex));
+	TypeCoolplate:
+		ConfigManagement.Initialization(ADR(Config), ADR(ConfigOld), SIZEOF(Config), 'sHotplateConfig', CONCAT('CP', StationIndex));
+END_CASE
+ConfigPlausibility					REF= Config.ConfigPlausibility;
+
+RecipeManagement.Initialization(
+		iStation,
+		ADR(RecipeLoad),
+		ADR(HOTPLATE_RECIPE_EDITE),
+		ADR(HOTPLATE_RECIPE_EMPTY),
+		ADR(RecipeRead),
+		ADR(Recipe),
+		SIZEOF(sHotplateRecipe),
+		'sHotplateRecipe',
+		0
+		);
+
+CASE iStationStatus.StationType OF
+	TypeHotplate:
+		ITempController	:=	HOTPLATE_TempRegler;
+		IF iStation = iStationStatus.StationType THEN
+			HOTPLATE_TempRegler.Config 						REF= 	Config.Temperature;
+			HOTPLATE_TempRegler.rInTuneTargetTemperature	:=		100;
+			HOTPLATE_TempRegler.tTaskCycleTime 				:= 		T#2MS;
+			HOTPLATE_TempRegler.rInMinTemperature			:=		20;
+			HOTPLATE_TempRegler.rInMaxTemperature			:=		200;
+		END_IF
+	TypeCoolplate:
+		CP_Chiller.ErrorIndex_SystemError	:=	HOTPLATE_ErrorNr.eSMCChillerHasError;
+		ITempController	:=	CP_Chiller;
+		IF iStation = iStationStatus.StationType THEN
+			CP_Chiller.rInOffset 							REF= 	Config.ChillerOffset;
+			CP_Chiller.rInMinTemperature					:=		15;
+			CP_Chiller.rInMaxTemperature					:=		25;
+			CP_Chiller.Initialization(iStation);
+		END_IF
+END_CASE
+
+CASE iStationStatus.StationType OF
+	TypeHotplate:
+		DataLogger.format				:=		'%0.1f;$N';
+		DataLogger.Data[1].Name			:=		'Temperature(°C)';
+		DataLogger.Data[1].Value 		REF= 	HOTPLATE_TempRegler.rOutCurrentTemperature;
+		DataLogger.Data[1].Tolerence	:=		0.1;
+	TypeCoolplate:
+		DataLogger.format				:=		'%0.1f;$N';
+		DataLogger.Data[1].Name			:=		'Temperature(°C)';
+		DataLogger.Data[1].Value 		REF= 	CP_Chiller.rOutCurrentTemperature;
+		DataLogger.Data[1].Tolerence	:=		0.1;
+END_CASE
+
+]]></ST>
+      </Implementation>
+    </Method>
+    <Method Name="MAIN" Id="{f78004a7-fcc3-472f-b8ab-8046ac0b7dbc}">
+      <Declaration><![CDATA[METHOD MAIN : BOOL
+VAR_INPUT
+END_VAR
+]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[IF iStation = iStationStatus.StationType THEN
+	ITempController.MAIN();
+END_IF
+
+HOTPLATE_TemperatureTrend[iStation](
+			Current := ITempController.CurrentTemperature,
+			Target 	:= ITempController.TargetTemperature
+			);
+
+IO();]]></ST>
+      </Implementation>
+    </Method>
+    <Method Name="MEDIA" Id="{7d4623df-11d4-48d9-97c1-d30644acbda3}">
+      <Declaration><![CDATA[METHOD MEDIA : BOOL
+VAR_INPUT
+	TargetMedia	: UDINT;
+END_VAR
+]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[]]></ST>
+      </Implementation>
+    </Method>
+    <Method Name="PrepInOut" Id="{971aa2e3-c7e0-4fc2-b1f4-2d84b7964afa}">
+      <Declaration><![CDATA[METHOD PrepInOut : BOOL]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[PrepInOut := TRUE;]]></ST>
+      </Implementation>
+    </Method>
+    <Method Name="RCPAddStep" Id="{b7c1a6d2-7f1e-4b5f-baea-66c9c04d1a99}">
+      <Declaration><![CDATA[METHOD RCPAddStep : BOOL
+VAR_INPUT
+END_VAR
+]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[]]></ST>
+      </Implementation>
+    </Method>
+    <Method Name="RCPStepRemove" Id="{12dc1bbd-d248-4ed7-8d80-c7c9393f5657}">
+      <Declaration><![CDATA[METHOD RCPStepRemove : BOOL
+VAR_INPUT
+END_VAR
+]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[]]></ST>
+      </Implementation>
+    </Method>
+    <Method Name="Rezeptendebedingungen" Id="{635772dd-4211-483b-9ee7-724b850e54e7}" FolderPath="Start\">
+      <Declaration><![CDATA[METHOD Rezeptendebedingungen : BOOL
+VAR_INPUT
+END_VAR
+]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[CurrentStep :=CurrentStep +1;
+IF CurrentStep > Recipe.STEP_COUNT THEN	(*Rezeptende*)
+	Step := Step +1;
+ELSE
+	Step := StepRecipeStart;
+END_IF
+]]></ST>
+      </Implementation>
+    </Method>
+    <Method Name="Standby" Id="{9755c23b-2bd8-4df2-aaf7-28f7bcabe18d}">
+      <Declaration><![CDATA[METHOD Standby : BOOL
+VAR_INPUT
+	bStart	:	BOOL;
+	Step	:	REFERENCE TO INT;
+END_VAR
+]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[CASE Step OF
+	0:
+		StandbyTimer(IN := bStart, PT := UDINT_TO_TIME(StandbyDelay[iStation]*1000));
+		IF StandbyTimer.Q THEN
+			StandbyTimer(IN := FALSE);
+			Step := 10;
+		END_IF
+	10:
+//		ITempController.TargetTemperature :=  RecipeStandby.TEMPERATURE;
+		ITempController.Enable := TRUE;
+		Step := 0;
+END_CASE]]></ST>
+      </Implementation>
+    </Method>
+    <Method Name="Start" Id="{e3c6a83a-c923-40da-b9fb-1bd1106a7265}">
+      <Declaration><![CDATA[METHOD Start : BOOL
+]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[CASE _Step OF
+	0:
+		_Step := StepRecipeStart;
+	StepRecipeStart:
+		IF StepEndCondition() THEN
+			_Step := 100;
+		END_IF
+	100:
+		_Step 	:=	0;
+		Start	:=	TRUE;
+END_CASE
+]]></ST>
+      </Implementation>
+    </Method>
+    <Method Name="StepEndCondition" Id="{b30d2d50-6cad-421e-b323-ed892cd3437e}" FolderPath="Start\">
+      <Declaration><![CDATA[METHOD StepEndCondition : BOOL
+VAR_INPUT
+END_VAR
+]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[StepTimer(IN := TRUE, PT := LREAL_TO_TIME(Recipe.StepTime*1000));
+IF StepTimer.Q THEN
+	StepEndCondition := TRUE;
+	StepTimer(IN := FALSE);
+END_IF]]></ST>
+      </Implementation>
+    </Method>
+    <Method Name="ToVisu" Id="{eb1703d7-45ab-4508-99e9-1bdfc8585af7}">
+      <Declaration><![CDATA[METHOD ToVisu : BOOL
+VAR_INPUT
+END_VAR
+]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[VisuHotplateAutoRecipe			REF=	Recipe;
+VisuHPTrend 					REF= 	HOTPLATE_TemperatureTrend[iStation];
+VisuHotplateConfig				REF=	HOTPLATE_MAIN[iStationStatus.StationType].Config;
+
+CASE iStationStatus.StationType OF
+	TypeHotplate:
+		VisuIITempController	:=		HOTPLATE_TempRegler;
+	TypeCoolplate:
+		VisuIITempController	:=		CP_Chiller;
+END_CASE
+]]></ST>
+      </Implementation>
+    </Method>
+  </POU>
+</TcPlcObject>
--- a/Hotplate/POUs/Peripherie/HOTPLATE_IO_FB.TcPOU
+++ b/Hotplate/POUs/Peripherie/HOTPLATE_IO_FB.TcPOU
@@ -0,0 +1,66 @@
+<?xml version="1.0" encoding="utf-8"?>
+<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
+  <POU Name="HOTPLATE_IO_FB" Id="{d6c2e60e-7c3f-4ac6-8faa-8ca468e62db4}" SpecialFunc="None">
+    <Declaration><![CDATA[FUNCTION_BLOCK HOTPLATE_IO_FB EXTENDS Station_GENERAL_IO_FB
+VAR_INPUT
+//	bOutN2			:	BOOL;
+//	bOutVacuum		:	BOOL;
+//	bOutVacOut		:	BOOL;
+//	bOutShutter		:	BOOL;
+END_VAR
+
+VAR_OUTPUT
+//	bInVacuum						:	BOOL;
+//	bInShutterOpen 					:	BOOL;
+	bInReferenceSensor				:	BOOL;
+	bInOverTemp				AT %I*	:	BOOL;
+//	CANStatus			AT %I*		:	USINT;
+	rInCurrentTemperature			:	LREAL;
+	InCurrentTemperature	AT %I*	:	INT;
+END_VAR
+
+VAR
+END_VAR
+]]></Declaration>
+    <Implementation>
+      <ST><![CDATA[//MediaCheck();
+(*
+IF bInReferenceSensor THEN
+	iStationStatus.Ist.PrepIn 	:= FALSE;
+	iStationStatus.Ist.PrepOut 	:= FALSE;
+END_IF
+*)
+
+CASE iStationStatus.StationType OF
+	TypeHotplate:
+		rInCurrentTemperature := HOTPLATE_TempRegler.rOutCurrentTemperature;
+	TypeCoolplate:
+		rInCurrentTemperature := InCurrentTemperature;
+		rInCurrentTemperature := rInCurrentTemperature/10;
+END_CASE]]></ST>
+    </Implementation>
+    <Method Name="Initialization" Id="{5ae12870-9b1c-4b8f-b9d4-34f9d7c40b29}">
+      <Declaration><![CDATA[METHOD Initialization : BOOL
+VAR_INPUT
+	iStation	:	INT;
+END_VAR
+]]></Declaration>
+      <Implementation>
+        <ST><![CDATA[InitializationExt(iStation);]]></ST>
+      </Implementation>
+    </Method>
+    <Action Name="MediaCheck" Id="{4b47197f-6cb4-4618-90a2-57a8f30babe6}">
+      <Implementation>
+        <ST><![CDATA[CASE iStationStatus.StationType OF
+	TypeHotplate:
+		AlarmSend(iStation, HOTPLATE_ErrorNr.eOverTemp, FALSE, eReportType.Warning, sAvailableResponse.Ok, NOT bInOverTemp);
+END_CASE
+
+DelayTimer(IN := TRUE AND InAktorspannung, PT := T#5S);
+ IF NOT DelayTimer.Q  THEN
+	 RETURN;
+ END_IF]]></ST>
+      </Implementation>
+    </Action>
+  </POU>
+</TcPlcObject>