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169
PLC/4 HV/DUTs/HV_ErrorNr.TcTLEO
Normal file
169
PLC/4 HV/DUTs/HV_ErrorNr.TcTLEO
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<?xml version="1.0" encoding="utf-8"?>
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<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
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<EnumerationTextList Name="HV_ErrorNr" Id="{8f29b822-eec2-4201-8996-e8831ca0ba13}">
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<Declaration><![CDATA[{attribute 'qualified_only'}
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{attribute 'strict'}
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TYPE HV_ErrorNr:(
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eNoError := 0,
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eNoWafer := 10,
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wTempOutOfRange := 20,
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eNotTuned := 30,
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eOverTemp := 50,
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eNoCommunication := 60,
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eTimeoutShutterOpen := 100,
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eTimeoutShutterClose := 101,
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eTimeoutN2PressureRelease := 110,
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eTimeoutN2Pressure := 111,
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eTimeoutCylinderPressure := 120,
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eTimeoutChamberOpen := 130,
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eTimeoutChamberClose := 131,
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eChamberOpenIsNotOpen := 150
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);
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END_TYPE]]></Declaration>
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<XmlArchive>
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<Data>
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<o xml:space="preserve" t="TextListEnumerationTextListObject">
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<l n="TextList" t="ArrayList" cet="TextListRow">
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<o>
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<v n="TextID">"eNoError"</v>
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<v n="TextDefault">"0"</v>
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<l n="LanguageTexts" t="ArrayList" cet="String">
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<v></v>
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<v></v>
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</l>
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</o>
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<o>
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<v n="TextID">"eNoWafer"</v>
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<v n="TextDefault">"10"</v>
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<l n="LanguageTexts" t="ArrayList" cet="String">
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<v>Timeout Substrate Detection</v>
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<v>Timeout-Substraterkennung</v>
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</l>
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</o>
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<o>
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<v n="TextID">"wTempOutOfRange"</v>
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<v n="TextDefault">"20"</v>
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<l n="LanguageTexts" t="ArrayList" cet="String">
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<v>Temperature Out of Range</v>
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<v>Temperatur außerhalb des zulässigen Bereichs</v>
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</l>
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</o>
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<o>
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<v n="TextID">"eNotTuned"</v>
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<v n="TextDefault">"30"</v>
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<l n="LanguageTexts" t="ArrayList" cet="String">
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<v>Hotplate is not tuned</v>
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<v>Hotplate is not tuned</v>
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</l>
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</o>
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<o>
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<v n="TextID">"eOverTemp"</v>
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<v n="TextDefault">"50"</v>
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<l n="LanguageTexts" t="ArrayList" cet="String">
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<v>Over Temperature</v>
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<v>Over Temperature</v>
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</l>
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</o>
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<o>
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<v n="TextID">"eNoCommunication"</v>
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<v n="TextDefault">"60"</v>
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<l n="LanguageTexts" t="ArrayList" cet="String">
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<v>HV No Communication</v>
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<v>HV No Communication</v>
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</l>
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</o>
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<o>
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<v n="TextID">"eTimeoutShutterOpen"</v>
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<v n="TextDefault">"100"</v>
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<l n="LanguageTexts" t="ArrayList" cet="String">
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<v>Timeout Shutter Open</v>
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<v>Timeout Shutter Open</v>
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</l>
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</o>
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<o>
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<v n="TextID">"eTimeoutShutterClose"</v>
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<v n="TextDefault">"101"</v>
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<l n="LanguageTexts" t="ArrayList" cet="String">
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<v>Timeout Shutter Close</v>
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<v>Timeout Shutter Close</v>
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</l>
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</o>
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<o>
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<v n="TextID">"eTimeoutN2PressureRelease"</v>
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<v n="TextDefault">"110"</v>
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<l n="LanguageTexts" t="ArrayList" cet="String">
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<v>Timeout Chamber Pressure release</v>
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<v>Timeout Druckentlastung der Kammer</v>
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</l>
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</o>
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<o>
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<v n="TextID">"eTimeoutN2Pressure"</v>
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<v n="TextDefault">"111"</v>
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<l n="LanguageTexts" t="ArrayList" cet="String">
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<v>Timeout Chamber Pressure</v>
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<v>Timeout-Kammerdruck</v>
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</l>
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</o>
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<o>
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<v n="TextID">"eTimeoutCylinderPressure"</v>
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<v n="TextDefault">"120"</v>
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<l n="LanguageTexts" t="ArrayList" cet="String">
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<v>Timeout Cylinder Pressure</v>
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<v>Timeout-Zylinderdruck</v>
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</l>
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</o>
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<o>
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<v n="TextID">"eTimeoutChamberOpen"</v>
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<v n="TextDefault">"130"</v>
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<l n="LanguageTexts" t="ArrayList" cet="String">
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<v>Timeout Chamber Open</v>
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<v>Timeout-Kammer Offen</v>
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</l>
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</o>
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<o>
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<v n="TextID">"eTimeoutChamberClose"</v>
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<v n="TextDefault">"131"</v>
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<l n="LanguageTexts" t="ArrayList" cet="String">
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<v>Timeout Chamber Close</v>
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<v>Timeout-Kammer Schließen</v>
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</l>
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</o>
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<o>
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<v n="TextID">"eChamberOpenIsNotOpen"</v>
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<v n="TextDefault">"150"</v>
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<l n="LanguageTexts" t="ArrayList" cet="String">
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<v>Chamber Open Is Not Open</v>
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<v>Chamber Open Is Not Open</v>
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</l>
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</o>
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<o>
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<v n="TextID">""</v>
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<v n="TextDefault">""</v>
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<l n="LanguageTexts" t="ArrayList" cet="String">
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<v></v>
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<v></v>
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</l>
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</o>
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</l>
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<l n="Languages" t="ArrayList" cet="String">
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<v>en</v>
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<v>de</v>
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</l>
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<v n="GuidInit">{65f8ed53-88f3-45f1-8486-684ee3f71cdf}</v>
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<v n="GuidReInit">{7887b2f1-cf0f-40e3-ac41-c5ed36a9e849}</v>
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<v n="GuidExitX">{a3499053-6a88-4c9b-83f7-5d01d57e25cc}</v>
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</o>
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</Data>
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<TypeList>
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<Type n="ArrayList">System.Collections.ArrayList</Type>
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<Type n="Guid">System.Guid</Type>
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<Type n="String">System.String</Type>
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<Type n="TextListEnumerationTextListObject">{4b60233c-f940-4beb-b331-82133b520151}</Type>
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<Type n="TextListRow">{53da1be7-ad25-47c3-b0e8-e26286dad2e0}</Type>
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</TypeList>
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</XmlArchive>
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</EnumerationTextList>
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</TcPlcObject>
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22
PLC/4 HV/DUTs/Recipe/sHVRecipe.TcDUT
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22
PLC/4 HV/DUTs/Recipe/sHVRecipe.TcDUT
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<?xml version="1.0" encoding="utf-8"?>
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<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.12">
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<DUT Name="sHVRecipe" Id="{61618797-0ae1-495e-ab80-d4de8072107d}">
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<Declaration><![CDATA[TYPE sHVRecipe:
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STRUCT
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TEMPERATURE : LREAL := 30;
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TOL : LREAL := 1;
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N2 : LREAL := 2;
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// Ramp : USINT(0..5);
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// MeasurementRate : USINT(0..4);
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// I_Max : LREAL := 200;
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// V_Max : LREAL := 20;
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// I_Limit : LREAL := 10;
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// V_Limit : LREAL := 15;
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// Direction : BOOL;
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DelayTime : LREAL;
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DATA : ARRAY [1..maxRecipeSteps] OF sHVRecipeStepData;
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STEP_COUNT : USINT := 1;
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END_STRUCT
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END_TYPE]]></Declaration>
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</DUT>
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</TcPlcObject>
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17
PLC/4 HV/DUTs/Recipe/sHVRecipeStepData.TcDUT
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17
PLC/4 HV/DUTs/Recipe/sHVRecipeStepData.TcDUT
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<?xml version="1.0" encoding="utf-8"?>
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<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
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<DUT Name="sHVRecipeStepData" Id="{cd2b13e9-a8a8-423c-a8f7-1917f8c7771a}">
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<Declaration><![CDATA[TYPE sHVRecipeStepData :
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STRUCT
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Ramp : USINT(0..5);
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MeasurementRate : USINT(0..4);
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I_Max : LREAL := 200;
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V_Max : LREAL := 20;
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I_Limit : LREAL := 10;
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V_Limit : LREAL := 15;
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Direction : BOOL;
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END_STRUCT
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END_TYPE
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]]></Declaration>
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</DUT>
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</TcPlcObject>
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26
PLC/4 HV/DUTs/eHVMedienNamen.TcDUT
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26
PLC/4 HV/DUTs/eHVMedienNamen.TcDUT
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<?xml version="1.0" encoding="utf-8"?>
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<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.6">
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<DUT Name="eHVMedienNamen" Id="{8526d440-0f96-4544-87a5-3fc8674823c5}">
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<Declaration><![CDATA[{attribute 'qualified_only'}
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{attribute 'strict'}
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TYPE eHVMedienNamen :
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(
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enum_member := 0,
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ShutterOpen,
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ShutterClose,
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ChamberOpen,
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ChamberClose,
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OverpressureN2,
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Exhaust,
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Valve,
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VacuumOn,
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VacuumOff
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);
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END_TYPE
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]]></Declaration>
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</DUT>
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</TcPlcObject>
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14
PLC/4 HV/DUTs/sHVConfig.TcDUT
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14
PLC/4 HV/DUTs/sHVConfig.TcDUT
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<?xml version="1.0" encoding="utf-8"?>
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<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.6">
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<DUT Name="sHVConfig" Id="{f25e05ec-2c93-4148-9bf6-c1b07aa98634}">
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<Declaration><![CDATA[TYPE sHVConfig :
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STRUCT
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Temperature : sConfigTemperatureController;
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StandbyTemperature : LREAL := 60;
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DefaultChamberPressure : LREAL := 1;
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ConfigPlausibility : BOOL := FALSE;
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END_STRUCT
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END_TYPE
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]]></Declaration>
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</DUT>
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</TcPlcObject>
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