This commit is contained in:
2026-01-08 11:08:17 +01:00
commit fe882dc444
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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.12">
<POU Name="ALIGNER_IO_FB" Id="{617e5ee2-ae00-42c0-8de6-a2292df23fc7}" SpecialFunc="None">
<Declaration><![CDATA[FUNCTION_BLOCK ALIGNER_IO_FB EXTENDS Station_GENERAL_IO_FB
VAR_OUTPUT
rInDiameter : LREAL; //mm
rInRoundness : LREAL; //mm
rInX_Coordinates : LREAL; //mm
rInY_Coordinates : LREAL; //mm
END_VAR
VAR
KeyenceSensor AT %I* : ARRAY[0..3] OF UDINT;
END_VAR
VAR CONSTANT
END_VAR
VAR_INPUT
ChuckVacuum : PneumaticCylinder_FB;
END_VAR
]]></Declaration>
<Implementation>
<ST><![CDATA[//LedCylinder();
ChuckVacuum();
ChuckVacuum.bInDown := NOT ChuckVacuum.bInUp;
rInDiameter := KeyenceSensor[0];
rInDiameter := rInDiameter*2;
rInDiameter := rInDiameter /1000;
rInRoundness := KeyenceSensor[1];
rInRoundness := rInRoundness/1000;
rInX_Coordinates := UDINT_TO_DINT(KeyenceSensor[2]);
rInX_Coordinates := rInX_Coordinates /1000;
rInY_Coordinates := UDINT_TO_DINT(KeyenceSensor[3]);
rInY_Coordinates := rInY_Coordinates /1000;
IF ROBOT_MAIN.TargetStation = iStation THEN
CASE CMD[RobotStation] OF
GetCMD:
IF ROBOT_MAIN.RobotControl.bInPartOnSucker[ROBOT_MAIN.TargetPuddle] THEN
ChuckVacuum.Down(TRUE);
END_IF
PutCMD:
IF NOT ROBOT_MAIN.RobotControl.bInPartOnSucker[ROBOT_MAIN.TargetPuddle] THEN
ChuckVacuum.Up(TRUE);
END_IF
ChangeCMD:
IF SpinnerVacOff THEN
ChuckVacuum.Down(TRUE);
END_IF
IF SpinnerVacOn THEN
ChuckVacuum.Up(TRUE);
END_IF
END_CASE
END_IF]]></ST>
</Implementation>
<Method Name="Initialization" Id="{a871eb65-cceb-4b85-87c8-1d7073b58215}">
<Declaration><![CDATA[METHOD Initialization
VAR_INPUT
iStation : INT;
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[InitializationExt(iStation);
ChuckVacuum.Initialization(
iStation,
eAlignerMedienNamen.ChuckVacuumOn,
eAlignerMedienNamen.ChuckVacuumOff,
SPINNER_ErrorNr.eChuckVacuumOn,
Peripherie_GVL.ServiceNameChuckVacuumOn,
Peripherie_GVL.ServiceNameChuckVacuumOff
);]]></ST>
</Implementation>
</Method>
</POU>
</TcPlcObject>

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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.13">
<POU Name="ALIGNER_MAIN_FB" Id="{776bb155-78b6-4cd1-a38b-c250c1e10738}" SpecialFunc="None">
<Declaration><![CDATA[FUNCTION_BLOCK ALIGNER_MAIN_FB EXTENDS Station_GENERAL_MAIN_FB IMPLEMENTS I_STATION_CMD_CALL
VAR_INPUT
IO : ALIGNER_IO_FB;
bCalibration : BOOL;
END_VAR
VAR_OUTPUT
Center : sPoint;
Diameter : LREAL;
Roundness : LREAL;
END_VAR
VAR
TMX_5000 : TMX_5000_FB;
XAxis : AXIS_FB;
YAxis : AXIS_FB;
Config : sAlignerConfig;
ConfigOld : sAlignerConfig;
XAxis_DefaultPosition : LREAL;
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[]]></ST>
</Implementation>
<Method Name="CloseInOut" Id="{a0336e32-2f81-4f51-b564-9eda8a3acf8b}">
<Declaration><![CDATA[METHOD CloseInOut : BOOL
VAR_INST
GripperSize : INT;
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[CASE _Step OF
0:
GripperSize := ROBOT_MAIN.GetGripperSize(iStationStatus.WaferInfo[0].Size);
CASE iCMD OF
CloseInCMD:
_Step := 10;
CloseOutCMD:
_Step := 50;
END_CASE
10:
Center.X := 0;
Center.Y := 0;
Diameter := 0;
Roundness := 0;
IF TMX_5000.ProgramChange(GripperSize) THEN
_Step := 0;
CloseInOut := TRUE;
END_IF
50:
XAxis.rInTargetPosition := Config.RobotHandlingPosition[GripperSize].X;
XAxis.rInTargetVelocity := Config.X_DefaultVelocity;
YAxis.rInTargetPosition := Config.RobotHandlingPosition[GripperSize].Y;
YAxis.rInTargetVelocity := Config.Y_DefaultVelocity;
_Step := 60;
60:
IF XAxis.MoveAbsolute() AND YAxis.MoveAbsolute() THEN
_Step := 0;
CloseInOut := TRUE;
END_IF
END_CASE
]]></ST>
</Implementation>
</Method>
<Method Name="FB_Init" Id="{0eee1379-e597-4345-b84b-dc11d41915ec}">
<Declaration><![CDATA[//FB_Init is always available implicitly and it is used primarily for initialization.
//The return value is not evaluated. For a specific influence, you can also declare the
//methods explicitly and provide additional code there with the standard initialization
//code. You can evaluate the return value.
METHOD FB_Init: BOOL
VAR_INPUT
bInitRetains: BOOL; // TRUE: the retain variables are initialized (reset warm / reset cold)
bInCopyCode: BOOL; // TRUE: the instance will be copied to the copy code afterward (online change)
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[_DataLogger := TRUE;
_VisuName := 'ALIGNER';
_SchedulerManagement := TRUE;
_ManualSizeSelectionAvailable := TRUE;]]></ST>
</Implementation>
</Method>
<Method Name="INIT" Id="{6a26cf46-6760-4e2a-968a-62bc5a2d5c0d}">
<Declaration><![CDATA[METHOD INIT : BOOL
]]></Declaration>
<Implementation>
<ST><![CDATA[CASE _Step OF
0:
IF TMX_5000.RunMode(TRUE) THEN
XAxis.bOutInitDone := FALSE;
YAxis.bOutInitDone := FALSE;
_Step := 10;
END_IF
10:
IO.ChuckVacuum.Up(TRUE);
IF NOT XAxis.bOutInitDone THEN
XAxis.Init();
END_IF
IF NOT YAxis.bOutInitDone THEN
YAxis.Init();
END_IF
IF XAxis.bOutInitDone AND YAxis.bOutInitDone THEN
_Step := 20;
END_IF
20:
XAxis.rInTargetPosition := 0;
XAxis.rInTargetVelocity := Config.X_DefaultVelocity;
YAxis.rInTargetPosition := 0;
YAxis.rInTargetVelocity := Config.Y_DefaultVelocity;
IF XAxis.MoveAbsolute() AND YAxis.MoveAbsolute() THEN
_Step := 30;
END_IF
30:
IF IO.ChuckVacuum.bInUp THEN
iStationStatus.WaferInfo[0].Number := 100;
ELSE
IO.ChuckVacuum.Down(TRUE);
END_IF
_Step := 0;
INIT := TRUE;
END_CASE]]></ST>
</Implementation>
</Method>
<Method Name="Initialization" Id="{25efd6e4-2ecd-4902-81d2-339bdb708353}">
<Declaration><![CDATA[METHOD Initialization : BOOL
VAR_INPUT
iStation : INT;
END_VAR
]]></Declaration>
<Implementation>
<ST><![CDATA[InitializationExt(iStation);
iStationStatus.NoScan := TRUE;
iStationStatus.NoRecipe := TRUE;
IO.Initialization(iStation);
iStationStatus.StationName := 'Aligner';
RecipeStationName[iStation] := 'Aligner';
iStationStatus.ErrorList := 'ALIGNER_ErrorNr';
ConfigManagement.Initialization(ADR(Config), ADR(ConfigOld), SIZEOF(Config), 'sAlignerConfig', 'Aligner');
ConfigPlausibility REF= Config.ConfigPlausibility;
TMX_5000.Initialization(iStation);
{region "X Axis"}
XAxis.Config.sInName := 'X';
XAxis.Config.DeviceID := 1;
XAxis.Config.sInPositionUnit := 'mm';
XAxis.Config.sInVelocityUnit := 'mm/s';
XAxis.Config.sInAccelerationUnit := 'mm/s²';
XAxis.Config.rInMinPosition := -10;
XAxis.Config.rInMaxPosition := 10;
XAxis.Config.rInMaxVelocity := 10;
XAxis.Config.rInMinVelocity := 0.1;
XAxis.Config.rInMaxAcceleration := 50;
XAxis.Config.rInMinAcceleration := 0.1;
XAxis.Config.bInNoEncoder := TRUE;
XAxis.Config.bInRelativeEncoder := TRUE;
XAxis.Config.bInService := TRUE;
XAxis.Config.rInOffset REF= Config.X_Offset;
XAxis.Config.rInDefaultPosition REF= XAxis_DefaultPosition;
XAxis.Config.rInDefaultVelocity REF= Config.X_DefaultVelocity;
XAxis.Initialization(iStation);
XAxis.bInEnablePositive := TRUE;
XAxis.bInEnableNegative := TRUE;
{endregion}
{region "Y Axis"}
YAxis.Config.sInName := 'Y';
YAxis.Config.DeviceID := 2;
YAxis.Config.sInPositionUnit := 'mm';
YAxis.Config.sInVelocityUnit := 'mm/s';
YAxis.Config.sInAccelerationUnit := 'mm/s²';
YAxis.Config.rInMinPosition := -10;
YAxis.Config.rInMaxPosition := 10;
YAxis.Config.rInMaxVelocity := 10;
YAxis.Config.rInMinVelocity := 0.1;
YAxis.Config.rInMaxAcceleration := 50;
YAxis.Config.rInMinAcceleration := 0.1;
YAxis.Config.bInNoEncoder := TRUE;
YAxis.Config.bInRelativeEncoder := TRUE;
YAxis.Config.bInService := TRUE;
YAxis.Config.rInOffset REF= Config.Y_Offset;
YAxis.Config.rInDefaultPosition REF= XAxis_DefaultPosition;
YAxis.Config.rInDefaultVelocity REF= Config.Y_DefaultVelocity;
YAxis.Initialization(iStation);
YAxis.bInEnablePositive := TRUE;
YAxis.bInEnableNegative := TRUE;
{endregion}
ConfigManagement.FileName := 'Aligner';
DataLogger.format := '%0.3f;%0.3f;%0.3f;%0.3f;$N';
DataLogger.Data[1].Name := 'X (mm)';
DataLogger.Data[1].Value REF= Center.X;
DataLogger.Data[1].Tolerence := 0.01;
DataLogger.Data[2].Name := 'Y (mm)';
DataLogger.Data[2].Value REF= Center.Y;
DataLogger.Data[2].Tolerence := 0.001;
DataLogger.Data[3].Name := 'Diameter (mm)';
DataLogger.Data[3].Value REF= Diameter;
DataLogger.Data[3].Tolerence := 0.1;
DataLogger.Data[4].Name := 'Roundness (mm)';
DataLogger.Data[4].Value REF= Roundness;
DataLogger.Data[4].Tolerence := 0.1;]]></ST>
</Implementation>
</Method>
<Method Name="MAIN" Id="{9cf7526a-d13d-4844-b4ad-6d8c783ce101}">
<Declaration><![CDATA[METHOD MAIN : BOOL
VAR_INPUT
END_VAR
]]></Declaration>
<Implementation>
<ST><![CDATA[IO();
XAxis();
YAxis();
TMX_5000();]]></ST>
</Implementation>
</Method>
<Method Name="PrepInOut" Id="{0a96881a-2ba5-4bf7-8c73-d1adb06b73bf}">
<Declaration><![CDATA[METHOD PrepInOut : BOOL
VAR_INST
GripperSize : USINT;
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[CASE _Step OF
0:
CASE iCMD OF
PrepInCMD:
_Step := 10;
PrepOutCMD:
PrepInOut := TRUE;
END_CASE
10:
GripperSize := ROBOT_MAIN.GetGripperSize(iStationStatus.WaferInfo[0].Size);
XAxis.rInTargetPosition := Config.RobotHandlingPosition[GripperSize].X;
XAxis.rInTargetVelocity := Config.X_DefaultVelocity;
YAxis.rInTargetPosition := Config.RobotHandlingPosition[GripperSize].Y;
YAxis.rInTargetVelocity := Config.Y_DefaultVelocity;
_Step := 20;
20:
IF XAxis.MoveAbsolute() AND YAxis.MoveAbsolute() THEN
_Step := 0;
PrepInOut := TRUE;
END_IF
END_CASE]]></ST>
</Implementation>
</Method>
<Method Name="SetCalibration" Id="{711e4cb2-8003-42e7-a4d8-c18dc3d54615}">
<Declaration><![CDATA[METHOD SetCalibration
VAR_INPUT
TargetStation : INT;
TargetSize : INT;
TargetPaddle : INT;
Center : sPoint;
END_VAR
]]></Declaration>
<Implementation>
<ST><![CDATA[Config.CalibrationPosition[TargetStation][TargetSize][TargetPaddle] := Center;
ConfigManagement.CMD := eConfigCMD.Save;]]></ST>
</Implementation>
</Method>
<Method Name="Start" Id="{f2375d07-415a-4633-9dd2-e516d604a136}">
<Declaration><![CDATA[METHOD Start : BOOL
VAR
In : ARRAY[0..7] OF DINT;
i : INT;
END_VAR
VAR_INST
RefPoint : sPoint;
CassetteNumber : INT;
NextProcess : INT;
TargetEtcher : INT;
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[CASE _Step OF
0:
FOR i := 0 TO 7 DO
In[i] := UDINT_TO_DINT(TMX_5000.rInResult[i+7]);
END_FOR
Diameter := In[0];
Diameter := Diameter;
Diameter := Diameter /1000;
IF NOT ROBOT_MAIN.CheckDiameter(Diameter, iStationStatus.WaferInfo[0].Size) THEN
RETURN;
END_IF
Roundness := In[1];
Roundness := Roundness/1000;
Center.X := In[2];
Center.X := Center.X/1000;
IF ABS(Center.X) > 120 THEN
RETURN;
END_IF
Center.Y := In[3];
Center.Y := Center.Y/1000;
IF bCalibration THEN
bCalibration := FALSE;
_Step := 100;
ELSE
_Step := 10;
END_IF
10:
CASE CMD[FirstStation] OF
StartCMD:
CassetteNumber := iStationStatus.WaferInfo[0].CassetteNumber;
NextProcess := iStationStatus.WaferInfo[0].FlowStepNumber +1;
TargetEtcher := CASSETTE_PROCESS[CassetteNumber][iStationStatus.WaferInfo[0].Number][NextProcess].TargetStation;
CASE TargetEtcher OF
20,21:
CASSETTE_PROCESS[CassetteNumber][iStationStatus.WaferInfo[0].Number][NextProcess].Alternative[1] := TargetEtcher;
CASSETTE_PROCESS[CassetteNumber][iStationStatus.WaferInfo[0].Number][NextProcess].Alternative[2] := TargetEtcher;
RefPoint := Config.CalibrationPosition[TargetEtcher][iStationStatus.WaferInfo[0].Size][0];
ELSE
RefPoint := Config.CalibrationPosition[FirstSpinner][iStationStatus.WaferInfo[0].Size][0];
END_CASE
ELSE
RefPoint := Config.CalibrationPosition[FirstSpinner][iStationStatus.WaferInfo[0].Size][0];
END_CASE
_Step := 20;
20:
FOR i := 0 TO 7 DO
In[i] := UDINT_TO_DINT(TMX_5000.rInResult[i+7]);
END_FOR
Center.X := In[2];
Center.X := Center.X/1000;
Center.Y := In[3];
Center.Y := Center.Y/1000;
IF ABS(RefPoint.X - Center.X) > 0.001 THEN
IF RefPoint.X < Center.X THEN
YAxis.bInJogNegative := TRUE;
YAxis.bInJogPositive := FALSE;
YAxis.rInTargetVelocity := ABS(RefPoint.X - Center.X);
ELSIF RefPoint.X > Center.X THEN
YAxis.bInJogNegative := FALSE;
YAxis.bInJogPositive := TRUE;
YAxis.rInTargetVelocity := ABS(RefPoint.X - Center.X);
ELSE
YAxis.bInJogNegative := FALSE;
YAxis.bInJogPositive := FALSE;
END_IF
END_IF
IF ABS(RefPoint.Y - Center.Y) > 0.001 THEN
IF RefPoint.Y < Center.Y THEN
XAxis.bInJogNegative := TRUE;
XAxis.bInJogPositive := FALSE;
XAxis.rInTargetVelocity := ABS(RefPoint.Y - Center.Y);
ELSIF RefPoint.Y > Center.Y THEN
XAxis.bInJogNegative := FALSE;
XAxis.bInJogPositive := TRUE;
XAxis.rInTargetVelocity := ABS(RefPoint.Y - Center.Y);
ELSE
XAxis.bInJogNegative := FALSE;
XAxis.bInJogPositive := FALSE;
END_IF
END_IF
IF XAxis.rInTargetVelocity < 0.005 THEN
XAxis.rInTargetVelocity := 0.005;
END_IF
IF YAxis.rInTargetVelocity < 0.005 THEN
YAxis.rInTargetVelocity := 0.005;
END_IF
DelayTimer(IN := ABS(RefPoint.X - Center.X)<= 0.001 AND ABS(RefPoint.Y - Center.Y) <=0.001, PT := T#100MS);
IF DelayTimer.Q THEN
DelayTimer(IN := FALSE);
YAxis.bInJogNegative := FALSE;
YAxis.bInJogPositive := FALSE;
XAxis.bInJogNegative := FALSE;
XAxis.bInJogPositive := FALSE;
XAxis.rInTargetVelocity := Config.X_DefaultVelocity;
YAxis.rInTargetVelocity := Config.Y_DefaultVelocity;
_Step := 30;
END_IF
30:
_Step := 100;
40:
FOR i := 0 TO 7 DO
In[i] := UDINT_TO_DINT(TMX_5000.rInResult[i+7]);
END_FOR
Center.X := In[2];
Center.X := Center.X/1000;
Center.Y := In[3];
Center.Y := Center.Y/1000;
100:
_Step := 0;
Start := TRUE;
END_CASE
]]></ST>
</Implementation>
</Method>
</POU>
</TcPlcObject>

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<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.11">
<POU Name="TMX_5000_FB" Id="{4d9eac39-6cf5-4d08-b510-b0066824a702}" SpecialFunc="None">
<Declaration><![CDATA[FUNCTION_BLOCK TMX_5000_FB EXTENDS Peripherie_FB
VAR_INPUT
bOutCmdReq AT %Q* : BOOL;
bOutResultAck AT %Q* : BOOL;
rOutCmdNr AT %Q* : UDINT;
rOutParameter AT %Q* : ARRAY [1..2] OF UDINT;
END_VAR
VAR_OUTPUT
bInRUN AT %I* : BOOL;
bInCmdReady AT %I* : BOOL;
bInCmdComplete AT %I* : BOOL;
rInCmdResult AT %I* : UDINT;
rInResult AT %I* : ARRAY [1..14] OF UDINT;
END_VAR
VAR
Test : BOOL;
ToRun : BOOL;
Test2 : BOOL;
PrNr : UDINT;
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[IF iStationStatus.Soll.Stop THEN
RunMode();
END_IF
IF Test THEN
IF RunMode(ToRun) THEN
Test := FALSE;
END_IF
END_IF
IF Test2 THEN
IF ProgramChange(PrNr) THEN
Test2 := FALSE;
END_IF
END_IF]]></ST>
</Implementation>
<Method Name="Initialization" Id="{da7fcae4-c6e6-4693-b43f-0c1671d808f0}">
<Declaration><![CDATA[METHOD Initialization : BOOL
VAR_INPUT
iStation : INT;
END_VAR
]]></Declaration>
<Implementation>
<ST><![CDATA[PeripherieInitialization(iStation);]]></ST>
</Implementation>
</Method>
<Method Name="ProgramChange" Id="{ccb2494b-9a08-4ffb-bf39-dd69143f78d2}">
<Declaration><![CDATA[METHOD ProgramChange : BOOL
VAR_INPUT
In : UDINT;
END_VAR
VAR_INST
Step : INT;
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[IF iStationStatus.Soll.Stop THEN
Step := 0;
RETURN;
END_IF
CASE Step OF
0:
IF bInCmdReady THEN
rOutCmdNr := 25; //Programm lesen
bOutCmdReq := TRUE;
Step := Step +1;
END_IF
1:
IF bInCmdComplete THEN
bOutCmdReq := FALSE;
Step := Step +1;
END_IF
2:
CASE rInCmdResult OF
0:
Step := 10;
ELSE
Step := 0;
END_CASE
10:
IF rInResult[2] = In THEN
Step := 100;
ELSE
Step := 50;
END_IF
50:
IF bInCmdReady THEN
rOutCmdNr := 24; //Programm wechseln
rOutParameter[1] := 1;
rOutParameter[2] := In;
bOutCmdReq := TRUE;
Step := Step +1;
END_IF
51:
IF bInCmdComplete THEN
bOutCmdReq := FALSE;
Step := Step +1;
END_IF
52:
CASE rInCmdResult OF
0:
Step := 0;
ELSE
Step := 0;
END_CASE
100:
Step := 0;
ProgramChange := TRUE;
END_CASE]]></ST>
</Implementation>
</Method>
<Method Name="RunMode" Id="{4b277ed8-4412-4d3f-a78e-cb1c64dc36be}">
<Declaration><![CDATA[METHOD RunMode : BOOL
VAR_INPUT
In : BOOL := FALSE;
END_VAR
VAR_INST
Step : INT;
END_VAR]]></Declaration>
<Implementation>
<ST><![CDATA[IF iStationStatus.Soll.Stop THEN
Step := 0;
RETURN;
END_IF
CASE Step OF
0:
IF bInRUN = In THEN
Step := 100;
ELSE
Step := 10;
END_IF
10:
IF bInCmdReady THEN
IF In THEN
rOutCmdNr := 8;
ELSE
rOutCmdNr := 9;
END_IF
bOutCmdReq := TRUE;
Step := Step +1;
END_IF
11:
IF bInCmdComplete THEN
bOutCmdReq := FALSE;
Step := Step +1;
END_IF
12:
CASE rInCmdResult OF
0:
Step := 0;
ELSE
Step := 10;
END_CASE
100:
RunMode := TRUE;
Step := 0;
END_CASE]]></ST>
</Implementation>
</Method>
</POU>
</TcPlcObject>