"eNoError" "0" No Error No Error "eVacuumOffTimeOut" "10" Chuck Vacuum off Timeout Chuck Vacuum off Timeout "eChuckVacuumOn" "20" Chuck Vacuum On Timeout Chuck Vacuum On Timeout "eChuckStorageFault" "30" More than one chock missing in the Storage Mehr als ein Chuck aus dem Speicher entnommen "eBeamSensorNoCommunication" "40" Beam Sensor No Communication Strahlsensor Keine Kommunikation "eDoorClose" "110" Door Not Closed Door Not Closed "eDoorLockTimeOut" "111" Door Lock Timeout Door Lock Timeout "eDoor2Close" "115" Robot Door Not Closed Robot Door Not Closed "eDoor2LockTimeOut" "116" Robot Door Lock Timeout Robot Door Lock Timeout "eShutterCloseTimeOut" "140" Shutter Close TimeOut Shutter Close TimeOut "eShutterOpenTimeOut" "141" Shutter Open TimeOut Shutter Open TimeOut "eMotorN2TimeOut" "160" Motor N2 Timeout Zeitüberschreitung Motor N2 "eVibration" "170" Emergency Stop: Motor Vibration Emergency Stop: Motor Vibration "eFuse" "180" Fuse Block Triggered Fuse Block Triggered "eLeakage" "200" Leakage Inlet Valves Area Leakage Inlet Valves Area "eLeakage2" "201" Leakage Flow Sensor Area Leakage Flow Sensor Area "eLeakage3" "202" Leakage Process Area Leakage Process Area "eLeakage4" "203" Leakage Above Process Leakage Above Process "ChuckUnlock1ExtendTimeout" "300" Chuck Unlock 1 Extend Timeout Chuck Unlock 1 Extend Timeout "ChuckUnlock1RetractTimeout" "301" Chuck Unlock 1 Retract Timeout Chuck Unlock 1 Retract Timeout "ChuckUnlock2ExtendTimeout" "310" Chuck Unlock 2 Extend Timeout Chuck Unlock 2 Extend Timeout "ChuckUnlock2RetractTimeout" "311" Chuck Unlock 2 Retract Timeout Chuck Unlock 2 Retract Timeout "ChuckEject1ExtendTimeout" "320" Chuck Eject 1 Extend Timeout Chuck Eject 1 Extend Timeout "ChuckEject1RetractTimeout" "321" Chuck Eject 1 Retract Timeout Chuck Eject 1 Retract Timeout "ChuckEject2ExtendTimeout" "330" Chuck Eject 2 Extend Timeout Chuck Eject 2 Extend Timeout "ChuckEject2RetractTimeout" "331" Chuck Eject 2 Retract Timeout Chuck Eject 2 Retract Timeout "eExhaust" "400" Error Exhaust Process Module Error Exhaust Process Module "ChuckDriveNotReady" "1000" Chuck Drive not Ready Chuck Drive not Ready "ChcukDrivePositioningTimeout" "1100" Chuck Drive Positioning Timeout Chuck Drive Positioning Timeout "ChuckDriveInterlock" "1200" Chuck Drive Interlock Chuck Drive Interlock "ChuckDriveNotEnabled" "1300" Chuck Drive not Enabled Chuck Drive not Enabled "ChuckDriveHomeError" "1400" Chuck Drive Home Error Chuck Drive Home Error "BSRDriveNotReady" "1001" BSR Axis Drive not Ready BSR Axis Drive not Ready "BSRDrivePositioningTimeout" "1101" BSR Axis Positioning Timeout BSR Axis Positioning Timeout "BSRDriveInterlock" "1201" BSR Axis Drive Interlock BSR Axis Drive Interlock "BSRDriveNotEnabled" "1301" BSR Axis Drive not Enabled BSR Axis Drive not Enabled "BSRDriveHomeError" "1401" BSR Axis Drive Home Error BSR Axis Drive Home Error "FlowMediaNotReady" "3000" FLow: Puddle Nozzle HF Not Ready FLow: Puddle Nozzle HF Not Ready "FlowMediaNotReady1" "3001" Flow: Puddle Nozzle SF1 Not Ready Flow: Puddle Nozzle SF1 Not Ready "FlowMediaNotReady2" "3002" Flow: Puddle Nozzle SF2 Not Ready Flow: Puddle Nozzle SF2 Not Ready "FlowMediaNotReady3" "3003" Flow: Puddle Nozzle SEF1 Not Ready Flow: Puddle Nozzle SEF1 Not Ready "FlowMediaNotReady4" "3004" Flow: Puddle Nozzle SF3 Not Ready Flow: Puddle Nozzle SF3 Not Ready "FlowMediaNotReady5" "3005" Flow: Puddle Nozzle Film Etchings Not Ready Flow: Puddle Nozzle Film Etchings Not Ready "FlowMediaNotReady6" "3006" Flow: Puddle Nozzle SEF2 Not Ready Flow: Puddle Nozzle SEF2 Not Ready "FlowMediaNotReady7" "3007" Flow: Puddle Nozzle C2H4O2 Not Ready Flow: Puddle Nozzle C2H4O2 Not Ready "FlowMediaNotReady8" "3008" Flow: Puddle Nozzle DIW Hot Not Ready Flow: Puddle Nozzle DIW Hot Not Ready "FlowMediaNotReady9" "3009" Flow: Static Nozzle C2H4O2 Not Ready Flow: Static Nozzle C2H4O2 Not Ready "FlowMediaNotReady10" "3010" Flow: Static Nozzle DIW Hot Not Ready Flow: Static Nozzle DIW Hot Not Ready "FlowMediaNotReady11" "3011" Flow: BSR Not Ready Flow: BSR Not Ready "eRobotNotInHomePosition" "5000" The robot is not in the home position. Der Roboter ist nicht in der Ausgangsposition. "eRobotNotInExternalMode" "5001" The robot is not in External Mode. The robot is not in External Mode. "wFlowUnderLimit" "6000" Puddle Nozzle SF1 Under Limit Puddle Nozzle SF1 Under Limit "wFlowUnderLimit2" "6001" Puddle Nozzle SF3 Under Limit Puddle Nozzle SF3 Under Limit "wFlowUnderLimit3" "6002" Puddle Nozzle SF2 Under Limit Puddle Nozzle SF2 Under Limit "wFlowUnderLimit4" "6003" Puddle Nozzle SEF2 Under Limit Puddle Nozzle SEF2 Under Limit "wFlowUnderLimit5" "6004" Puddle Nozzle SEF1 Under Limit Puddle Nozzle SEF1 Under Limit "wFlowUnderLimit6" "6005" Puddle Nozzle C2H4O2 Under Limit Puddle Nozzle C2H4O2 Under Limit "wFlowUnderLimit7" "6006" Static Nozzle C2H4O2 Under Limit Static Nozzle C2H4O2 Under Limit "wFlowUnderLimit8" "6007" Puddle Nozzle Film Etchings Under Limit Puddle Nozzle Film Etchings Under Limit "wFlowUnderLimit9" "6008" Puddle Nozzle HF Under Limit Puddle Nozzle HF Under Limit "wFlowOverLimit" "6100" Puddle Nozzle SF1 Over Limit Puddle Nozzle SF1 Over Limit "wFlowOverLimit2" "6101" Puddle Nozzle SF3 Over Limit Puddle Nozzle SF3 Over Limit "wFlowOverLimit3" "6102" Puddle Nozzle SF2 Over Limit Puddle Nozzle SF2 Over Limit "wFlowOverLimit4" "6103" Puddle Nozzle SEF2 Over Limit Puddle Nozzle SEF2 Over Limit "wFlowOverLimit5" "6104" Puddle Nozzle SEF1 Over Limit Puddle Nozzle SEF1 Over Limit "wFlowOverLimit6" "6105" Puddle Nozzle C2H4O2 Over Limit Puddle Nozzle C2H4O2 Over Limit "wFlowOverLimit7" "6106" Static Nozzle C2H4O2 Over Limit Static Nozzle C2H4O2 Over Limit "wFlowOverLimit8" "6107" Puddle Nozzle Film Etchings Over Limit Puddle Nozzle Film Etchings Over Limit "wFlowOverLimit9" "6108" Puddle Nozzle HF Over Limit Puddle Nozzle HF Over Limit "wFlowNotInRange" "6200" Puddle Nozzle SF1 Flow Not In Range Puddle Nozzle SF1 Flow Not In Range "wFlowNotInRange2" "6201" Puddle Nozzle SF3 Flow Not In Range Puddle Nozzle SF3 Flow Not In Range "wFlowNotInRange3" "6202" Puddle Nozzle SF2 Flow Not In Range Puddle Nozzle SF2 Flow Not In Range "wFlowNotInRange4" "6203" Puddle Nozzle SEF2 Flow Not In Range Puddle Nozzle SEF2 Flow Not In Range "wFlowNotInRange5" "6204" Puddle Nozzle SEF1 Flow Not In Range Puddle Nozzle SEF1 Flow Not In Range "wFlowNotInRange6" "6205" Puddle Nozzle C2H4O2 Flow Not In Range Puddle Nozzle C2H4O2 Flow Not In Range "wFlowNotInRange7" "6206" Static Nozzle C2H4O2 Flow Not In Range Static Nozzle C2H4O2 Flow Not In Range "wFlowNotInRange8" "6207" Puddle Nozzle Film Etchings Flow Not In Range Puddle Nozzle Film Etchings Flow Not In Range "wFlowNotInRange9" "6208" Puddle Nozzle HF Not In Range Puddle Nozzle HF Not In Range "" "" en de {27879455-6d3c-40bb-9807-2e0537f9ffcf} {119c5ff8-2ca0-4580-bbda-e58ca998665d} {78d31fcb-edb4-42c8-a342-eed1aaf41633} System.Collections.ArrayList System.Guid System.String {4b60233c-f940-4beb-b331-82133b520151} {53da1be7-ad25-47c3-b0e8-e26286dad2e0}