"eNoError" "0" "eNoWafer" "10" Timeout Substrate Detection Timeout-Substraterkennung "wTempOutOfRange" "20" Temperature Out of Range Temperatur außerhalb des zulässigen Bereichs "eNotTuned" "30" Hotplate is not tuned Hotplate is not tuned "eOverTemp" "50" Over Temperature Over Temperature "eNoCommunication" "60" HV No Communication HV No Communication "eTimeoutShutterOpen" "100" Timeout Shutter Open Timeout Shutter Open "eTimeoutShutterClose" "101" Timeout Shutter Close Timeout Shutter Close "eTimeoutN2PressureRelease" "110" Timeout Chamber Pressure release Timeout Druckentlastung der Kammer "eTimeoutN2Pressure" "111" Timeout Chamber Pressure Timeout-Kammerdruck "eTimeoutCylinderPressure" "120" Timeout Cylinder Pressure Timeout-Zylinderdruck "eTimeoutChamberOpen" "130" Timeout Chamber Open Timeout-Kammer Offen "eTimeoutChamberClose" "131" Timeout Chamber Close Timeout-Kammer Schließen "eChamberOpenIsNotOpen" "150" Chamber Open Is Not Open Chamber Open Is Not Open "" "" en de {65f8ed53-88f3-45f1-8486-684ee3f71cdf} {7887b2f1-cf0f-40e3-ac41-c5ed36a9e849} {a3499053-6a88-4c9b-83f7-5d01d57e25cc} System.Collections.ArrayList System.Guid System.String {4b60233c-f940-4beb-b331-82133b520151} {53da1be7-ad25-47c3-b0e8-e26286dad2e0}