"eNoError" "0" "eNoWafer" "5" "eShutterOpenTimeOut" "10" Shutter Open Timeout Shutter Open Timeout "wTempOutOfRange" "20" Temperature Out of Range Temperature Out of Range "eNotTuned" "30" Hotplate is not tuned Hotplate is not tuned "eOverTemp" "50" Over Temperature Over Temperature "eSMCCommTimeout" "1550" "eSMCChillerHasError" "2000" SMC Chiller has Error SMC Chiller has Error "ERR01" "2010" ERR01 System error 1 ERR01 System error 1 "ERR02" "2020" ERR02 System error 2 ERR02 System error 2 "ERR03" "2030" ERR03 Back-up data error ERR03 Back-up data error "ERR11" "2110" ERR11 DC power supply failure ERR11 DC power supply failure "ERR12" "2120" ERR12 Internal temperature sensor High temperature failure ERR12 Internal temperature sensor High temperature failure "ERR13" "2130" ERR13 Internal temperature sensor Low temperature failure ERR13 Internal temperature sensor Low temperature failure "ERR14" "2140" ERR14 Thermostat alarm ERR14 Thermostat alarm "ERR15" "2150" ERR15 Abnormal output alarm ERR15 Abnormal output alarm "ERR16" "2160" ERR16 Low circulating flow rate alarm (option) ERR16 Low circulating flow rate alarm (option) "ERR17" "2170" ERR17 Internal temperature sensor disconnection alarm ERR17 Internal temperature sensor disconnection alarm "ERR18" "2180" ERR18 External temperature sensor disconnection alarm ERR18 External temperature sensor disconnection alarm "ERR19" "2190" ERR19 Abnormal auto tuning alarm ERR19 Abnormal auto tuning alarm "ERR20" "2200" ERR20 Low fluid level alarm ERR20 Low fluid level alarm "TemperatureUpperLimit" "2300" WRN Temperature upper limit WRN Temperature upper limit "TemperatureLowerLimit" "2400" WRN Temperature lower limit WRN Temperature lower limit "" "" en de {453d555f-cb7d-4e85-a97f-0951f1544b97} {f30bfffe-5548-47c8-8fe4-2e3faa7ec4de} {939e808a-7028-4933-8510-bf7ffe28ad14} System.Collections.ArrayList System.Guid System.String {4b60233c-f940-4beb-b331-82133b520151} {53da1be7-ad25-47c3-b0e8-e26286dad2e0}