"eNoError" "0" "eDoor1CloseTimeout" "100" Door Close Timeout Door Close Timeout "eDoor1LockTimeout" "150" Door Lock Timeout Door Lock Timeout "eCommunicationError" "200" Communication Error Communication Error "wRemoveFromAligner" "300" Remove Wafer From Aligner Remove Wafer From Aligner "eCassetteDoor" "400" Cassette door is opened Cassette door is opened "eWaferNotTaken" "1000" wafer not taken from robot wafer not taken from robot "eWaferMissing" "1010" wafer is missing wafer is missing "eWaferCollision" "1020" Robot Collision Robot Collision "eTargetNotInitialized" "1030" "eMTRError" "1100" "eGETError" "1200" Substrate is not taken Substrat wird nicht genommen "ePUTError" "1300" "eGETChuckError" "1400" Chuck is not taken Chuck wird nicht genommen "eDummy" "" "" "" en de {ba436cad-54fc-4a0c-b7ba-0d2a8570775a} {3f20b2c9-e046-4fae-91b4-e006076df7e6} {ef127e8e-63e1-4c2a-a289-9058e2282683} System.Collections.ArrayList System.Guid System.String {4b60233c-f940-4beb-b331-82133b520151} {53da1be7-ad25-47c3-b0e8-e26286dad2e0}