"2203" "" "407" " %0.1f °C" "2778" " aa" "1274" " %d" "1066" " %s" "3670" " %s" "758" " Charge #" "325" " Flow" "1014" " Gut/Schlecht " "799" " %s" "4574" " %s:" "3185" " Automaric mode " "1704" " Drives off external" "3006" " External Automatic mode" "356" " Robot stop by message" "669" " Special position request" "2373" " Start external" "1121" "!" "202" """ "1209" "#" "2797" "$" "1323" "$ALARM_OFF" "3562" "$bOut_DRIVE_OFF" "1848" "$CONF_MESS" "3048" "$DRIVES_OFF" "236" "$DRIVES_ON" "2431" "$DRIVE_OFF" "165" "$EXT_START" "874" "$I_O_ACTCONF" "656" "$MOVE_ENABLE" "241" "$PERI_RDY" "2562" "$PRO_ACT" "2852" "$ROB_STOPPED" "1385" "$STOPMESS" "1721" "$USER_SAF" "146" "%" "144" "%.0f" "4332" "%.1f %" "5445" "%.1f bar" "1857" "%.1f L" "2234" "%.1f L/min" "1803" "%.1f ml" "1473" "%.2f bar" "3532" "%0.00f" "2637" "%0.00f mm" "2536" "%0.0f bar" "2721" "%0.0f byr" "375" "%0.0f L" "304" "%0.0f l" "569" "%0.0f Liter" "1816" "%0.0f lpm" "5140" "%0.0f ml" "2322" "%0.0f ml/min" "1588" "%0.0f rpm" "2215" "%0.0f rpm/s" "626" "%0.0f mm" "5801" "%0.0f°" "2013" "%0.1 mm" "20" "%0.1f" "5135" "%0.1f bar" "4165" "%0.1f KV" "2348" "%0.1f kV" "3785" "%0.1f mA" "963" "%0.1f ml" "6067" "%0.1f ml/min" "2178" "%0.1f mm" "568" "%0.1f mm#s" "456" "%0.1f mm/s" "1623" "%0.1f s" "3539" "%0.1f S" "3274" "%0.1f °C" "4101" "%0.1f bar" "549" "%0.1f mm" "1962" "%0.1f mm/s" "548" "%0.1f s" "388" "%0.1f °C" "4244" "%0.1fs" "2026" "%0.1f°" "1877" "%0.1f°C" "634" "%0.2f" "2375" "%0.2f bar" "754" "%0.2f kV" "2423" "%0.2f mA" "5120" "%0.2f mm" "270" "%0.2f mm" "5155" "%0.2f°" "3276" "%0.3 mm/s" "2725" "%0.3f" "2807" "%0.3f mA" "2106" "%0.3f mm" "479" "%0.3f mm/s" "3329" "%0.3f °/s" "3074" "%0.3f %" "662" "%0.3f mm" "2365" "%0.3f mm/s" "1443" "%0.3f!" "2082" "%0.3fmm" "2232" "%0.3f°" "980" "%1.1f" "3723" "%1.1f mm" "2244" "%1.1f mm/s" "812" "%1.1f s" "106" "%1.1f °" "2556" "%1.1f°" "3445" "%1.3f mm" "675" "%d" "82" "%d %" "937" "%d Bar" "966" "%d mm" "718" "%d mm/s" "1417" "%d mm/s²" "54" "%d Pixel" "311" "%d rpm" "593" "%d RPM" "3813" "%d rpm/s" "1811" "%d s" "1974" "%d V" "1349" "%d μm" "1249" "%d %" "3772" "%d %%" "672" "%d ml/m" "4130" "%d ml/min" "3346" "%d mm" "118" "%d mm/s" "968" "%d rpm" "766" "%d rpm/s" "2369" "%d s" "2344" "%d °/s" "1598" "%f mm" "405" "%s" "5317" "%s " "1685" "%s dd" "666" "%s ml/min" "1234" "%s dd" "531" "%s DD dd" "3761" "%s mm" "865" "%s Cord" "1408" "&" "1728" "(" "189" ")" "651" "*" "1766" "+" "1489" "-" "4" "." "193" "/" "6" "0" "3166" "1" "650" "1 kV" "340" "1/10 rpm" "1457" "100 mm" "6447" "120 mm" "1118" "123" "4636" "145 mm" "989" "2" "394" "20 kV" "1512" "3" "608" "4" "1524" "5" "5996" "58 mm" "12" "6" "521" "6"" "13" "7" "14" "8" "373" "8"" "6328" "89 mm" "15" "9" "586" ":" "1378" ";" "347" "=" "1048" "@" "3586" "A" "828" "a" "3621" "A °" "2745" "A Cord" "4855" "A%d" "1978" "A(°)" "6850" "A1" "2874" "A2" "3055" "A3" "4905" "A4" "1178" "A5" "2760" "A6" "2282" "Abfalltank" "1223" "Abort" "264" "Acceleration" "302" "Achnowledgment Service Position" "1125" "Acknowledge acyclical data error" "1847" "Acknowledgement of fault" "1115" "Activate energy cut-off" "753" "Actual Alarms" "1817" "Actual Position" "1095" "Admin" "1763" "Administrator" "1336" "Aligner" "4158" "APPL_RUN" "895" "Arm" "309" "Arm %d" "45" "ARM %d" "1320" "Arm 1" "198" "Arm 2" "785" "Arm Lift" "1078" "Automatic" "584" "Automatic %s" "2068" "Automatic Mode" "269" "Außenrotation" "636" "Axis" "2946" "Axis %s" "528" "B" "655" "b" "592" "B °" "5568" "B °)" "2769" "B Cord" "4520" "B(°)" "3" "Back" "2882" "BEAM SENSOR" "1220" "BEAM SENSOR" "3052" "bInI_O_ACTCONF" "295" "bIn_PERI_RDY" "1470" "Booster-Arm" "2034" "Bottom Up" "4303" "bOutInitialPosition" "1122" "Brake test required" "3759" "Brush" "3933" "Brush Front " "1590" "Brush Lift" "2126" "Brush Pair %s" "3348" "Brush Position" "1180" "Brush Rear" "2952" "Brush SC1 DIW" "2353" "Brush SC1 NH4OH" "1054" "Brush SC2 DIW" "6393" "Brush SC2 NH4OH" "3919" "Brush Speed" "6038" "Brush System" "1738" "BSR" "1968" "BSR Process Position" "2941" "C" "392" "c" "1500" "C °" "34" "C Cord" "1620" "C(°)" "4893" "Calibration Position" "4351" "Calipration Position" "1124" "Cancel" "969" "Checkbox" "5373" "Chiller" "943" "Chuck" "2186" "Chuck Vacuum" "1441" "Cleaning" "801" "Cleaning Cycles" "1488" "Cleanout" "3727" "Close In" "2552" "Close Out" "1727" "Close Position" "1894" "CMD" "2726" "Commissioning mode" "1174" "Config" "2030" "Config %s" "4514" "Copy" "5880" "Cord %s" "991" "Cover" "987" "Cover Position" "1553" "Cumulative Fail Counter" "1248" "Cumulative Pass Counter" "217" "Current Temperature" "809" "Current Position" "5469" "Current Ref. Position X" "1916" "Current Ref. Position Z" "693" "Current Velocity" "1660" "Cycle Stop" "68" "D" "4144" "d" "1570" "Data valid" "96" "Deactivate energy cut-off" "3075" "Default Acceleration" "4575" "Default Brush Speed" "3830" "Default velocity" "1748" "Default Velocity" "3848" "Default Speed" "4858" "Default Velocity" "1636" "Defect" "1015" "Del" "1703" "Delay" "1618" "Delay Time" "1726" "Delete" "1043" "Delete Wafer" "3471" "Diameter" "4770" "Direction" "3931" "Disabled" "3748" "DIW Hot %0.1f °C" "2622" "DIW Heater" "42" "Down" "3536" "Down Position" "970" "Drive enable" "1198" "Drive enable external" "362" "Drive release" "261" "Drives Om" "647" "Drives On" "783" "Drives on external" "1617" "Drop Done" "2237" "Drop Part" "700" "e" "93" "E" "5103" "Emergency" "1335" "Emergency Stop at Robot" "187" "Enable" "4174" "End by BSR" "971" "End by Robot" "2840" "End of Cycle" "6097" "Entwickler Druck" "1364" "Entwicklerdruckgrenze" "3534" "Error" "4320" "Esc" "2692" "Exhaust" "88" "f" "70" "F" "1196" "Fast Position" "1971" "Favorite Recipes" "925" "Feedback Program Number" "2894" "Feedback Program Number" "2417" "FeedbackProgram Number" "604" "Fill Timeout" "5232" "Finish Delay" "316" "Flow" "186" "Flow Sensor" "1694" "Flowmeter" "130" "Function test without part" "601" "g" "72" "G" "2390" "Gain" "2391" "Get" "1461" "Ghost operation active" "931" "Ghost operation not active" "2993" "Gripper Size" "3497" "GripperSize" "113" "h" "74" "H" "84" "Hand Mode" "1952" "Height At Tray" "2337" "High Pressure Pump" "1662" "Hight At Tray" "4643" "Hold Current" "834" "Home" "366" "Home Position" "755" "Home Velocity" "2033" "Home Acceleration" "65" "Home Position" "100" "Home Velocity" "349" "Homing Speed Fast" "4450" "Homing Speed Slow" "3073" "Horn Mute" "1363" "HV Parameter" "1407" "HV Cold" "408" "HV Hot" "3390" "HV Parameter" "58" "i" "103" "I" "5108" "I Limit" "1700" "I Max" "3681" "ID" "909" "IFS control message" "562" "Ignore" "2233" "Ignore All" "574" "Init" "1487" "Initial Position" "1574" "Initialization" "627" "Innenrotation" "3158" "IR" "3433" "I_Max" "278" "j" "76" "J" "3615" "Job Acknowledgement" "3019" "Job Done" "211" "Job Done Acknowledgement" "2151" "Job Type" "3138" "JobAcknowledgement" "1185" "Jukabo 1" "71" "Jukabo 2" "512" "Jukabo 3" "1438" "Julabo 1" "2898" "Julabo 2" "979" "k" "78" "K" "47" "Kammerdruck" "2985" "KOH Mix Ratio" "3600" "KUKA" "2961" "KUKA ROBOT" "786" "kV" "984" "l" "80" "L" "778" "Lat Point Reached" "92" "Length" "737" "Lesen" "1028" "Life bit from PLC to robot" "2179" "Life bit from robot to PLC" "36" "Lift Pos." "4024" "Limit" "957" "Loops" "3961" "Lot ID" "4170" "Lower" "628" "m" "56" "M" "789" "mA" "5047" "Main CDA" "2984" "Main N2" "1814" "Main Vacuum" "6133" "Manual" "2604" "Max" "5386" "Max Limit" "3719" "Max Position" "770" "Max Position" "1733" "Max Velocity" "936" "Max Close Acceleration " "1029" "Max Close Speed" "1722" "Max Closing Speed" "3695" "Max Number of Slots" "1243" "Max Open Speed" "2646" "Max Opening Speed" "4033" "Max Tank" "480" "Max Tank FILMÄTZEN" "6168" "MeasurementRate" "2003" "Mechanical Safeties" "127" "Media" "229" "Megaschall-Einheit" "2647" "Megasonic" "1329" "Megasonic Oben" "1798" "Megasonic Unten" "1351" "Megasonic Einheit Init" "1087" "Messrate" "1546" "Messung starten" "440" "Messung stoppen" "5529" "Messung starten" "2036" "Messung stoppen" "3151" "Middle" "102" "Middle Position" "3871" "Min" "1478" "Min Limit" "1653" "Min Position" "2172" "Mix Tank SEF" "59" "Mix Target Flow" "342" "ml/min" "2128" "Motor Controller" "2889" "MTR" "449" "n" "4296" "N" "1616" "N2" "1876" "N2 Motor Delay" "617" "Name" "2319" "Neustart" "2217" "NL" "1583" "None" "1914" "Nozzle" "4002" "Nozzle Number" "2419" "Nozzle %d" "2755" "Nozzle 1" "161" "Nozzle Number" "1298" "NozzleNumber" "1754" "Nozzles Calibration" "3111" "Nozzles Calibration" "2899" "Nozzles Check" "5500" "NozzlesCheck" "654" "o" "105" "O" "2530" "Offset" "2361" "Offset 6"" "303" "Offset 8"" "497" "off_x_b_cord" "2606" "off_y_b_cord" "301" "Ok" "4757" "Old Alarms" "2245" "On" "3253" "Open Position" "1562" "Operating mode test 1" "2635" "Operating mode test 2" "3087" "Operation Mode" "1123" "Operator" "3162" "Operator protection closed" "249" "Option 1" "2077" "Option 2" "89" "Option 3" "2436" "Option 4" "914" "Option 5" "4263" "Override" "470" "p" "107" "P" "1484" "Parity bit PGNO_PARITY" "1558" "Part OFF Sucker 1" "1911" "Part OFF Sucker 2" "1944" "Part OFF SuDrive releasecker 2" "2072" "Part ON Sucker 1" "157" "Part ON Sucker 2" "1056" "PCL" "151" "PGBO_VALID" "3622" "PGNO_PARITY" "682" "PGNO_REQ" "591" "Pick Done" "673" "Pick Part" "3460" "Pin Initialization" "953" "Plate Temperature" "1003" "Position" "2292" "Position Ready" "3965" "Pre Position" "3489" "Prep In" "2418" "Prep Out" "719" "Pressure" "482" "Process Mode" "3649" "Process Position" "5590" "Process Type" "6119" "ProcessType" "1375" "Program Number" "3318" "Program Ready" "1210" "Program Start" "791" "Programm Ready" "494" "Programme acknowledgement PGNO_VALID" "897" "Programme is running APPL_RUN" "1912" "Programme request PGNO_REQ" "170" "Pump %s" "1961" "Put" "804" "q" "4377" "Q" "95" "R" "265" "r" "2723" "Ramp" "6272" "Rampe" "4212" "Ratio" "2081" "Receiver" "329" "Receiver = Other" "1145" "Receiver Cassette" "5116" "Receiver Strategy" "1259" "Recipe" "3015" "Ref. X" "1573" "Ref. X mm" "5318" "Ref. Y mm" "1581" "Ref. Z mm" "1306" "Release" "1881" "Release Drop" "1579" "Release Pick" "343" "Release special position extension" "2850" "Remove All" "1092" "Reset" "873" "Retry" "3327" "Retry Flow" "109" "Robot" "5973" "ROBOT" "296" "Robot Process Position" "3594" "Robot Teach Position" "2502" "Robot Busy" "1837" "Robot drives are switched on" "1576" "Robot Handling Position" "2644" "Robot In Hand Mode" "1717" "Robot in Service" "543" "Robot in Service Position" "1622" "Robot is at 0 point" "2359" "Robot is on the track" "2783" "Robot Position" "660" "Robot Pre Position" "1483" "Robot Ready" "3223" "Robot stopped" "3702" "Robot Teach" "6295" "Rotation Position" "5424" "Roundness" "2349" "Rpm" "3981" "Run Current" "516" "s" "66" "S" "1384" "Safety Circuit" "6364" "SC1 DIW" "4967" "SC1 H2O2" "1454" "SC1 N2" "5599" "SC1 NH4OH" "5149" "SC2 DIW" "3149" "SC2 H2O2" "5040" "SC2 HCl" "1759" "SC2 N2" "1308" "Scan" "1031" "Schreiben" "3870" "Select All" "3978" "Send" "5455" "Sender = Receiver" "289" "Service" "1678" "Service %S" "3378" "Set" "4708" "Set as Predefined Position" "1295" "Set Wafer" "32" "Shift" "921" "Size Index" "872" "Slot Id" "2469" "Slot ID" "2184" "Slot Number" "73" "Speed" "590" "Speed Mode" "1083" "speed_proc_B_cord" "1699" "Speen" "498" "Standard Geschwindigkeit" "4619" "Standarddruck" "19" "Standby" "214" "Standby Temperature" "426" "Standby Delay" "2815" "Start" "3555" "Start Position" "387" "State" "2283" "Statical DIW" "2532" "Station" "920" "Station Taken" "4433" "Station Type" "1229" "StationTaken" "790" "Step Time" "1836" "Step: %s" "967" "Stepwith" "3191" "Stop after end of point" "1702" "Stop Cycle" "213" "Stop for Correction" "2714" "Sub Job" "2891" "Sucker 1" "2844" "Sucker 2" "2177" "Sucker 2 " "704" "t" "97" "T" "716" "Target Temperature" "5505" "Target Cassette" "4673" "Target Chuck" "126" "Target Flow" "16" "Target Flow (ml/min)" "3093" "Target Position" "2452" "Target Pressure (Bar)" "1501" "Target Program" "1997" "Target Slot" "313" "Target Speed (rpm)" "3905" "Target Startion" "2296" "Target Station" "1381" "Target Velocity" "389" "Target Volume" "4511" "TargetVolume" "2130" "Temperatur Gain" "3089" "Temperatur Offset" "1496" "Temperature" "4309" "Temperature DIW" "3778" "Temperature KOH" "195" "Temperature Parameter" "2498" "Temperature TMAH" "3189" "Test Faild" "3857" "Test Failed" "2050" "Test Ok" "4951" "TestStart" "1147" "Thickness" "150" "Thikness" "3424" "Time" "1172" "time_proc_B_cord" "201" "Toggle wafer" "335" "Toggle Wafer" "5613" "Tol" "3056" "Top Down" "1584" "Tray Teach" "3034" "TRF" "94" "Tune" "1111" "Tuning" "242" "u" "101" "U" "5876" "Unload Strategy" "2713" "Up" "3035" "Upper" "2598" "US2 Supply voltage switched on" "1756" "V" "577" "v" "1800" "V Limit" "714" "V Max" "207" "Vac In" "1749" "Vac Out" "3159" "Vacuum On Position" "1357" "VD" "756" "Velocity" "2125" "Visu Index" "2576" "VR" "599" "w" "91" "W" "2664" "Waiting For NIO" "5090" "Waiting For Receiver" "2158" "Waste Tank %s" "3787" "WRF" "46" "X" "489" "x" "3030" "X mm" "2066" "X Axis" "3146" "X Axis Offset" "2853" "X Axis Offset" "1406" "X Cord" "2120" "X(mm)" "3764" "Y" "465" "y" "4283" "Y mm" "606" "Y Axis" "594" "Y Axis Offset" "167" "Y Cord" "4216" "Y(mm)" "1723" "Z" "860" "z" "2258" "Z (mm)" "5019" "Z mm" "188" "Z Cord" "1184" "Zero Adjusment" "1517" "\" "1633" "_" "451" " Acyclic data received" "1652" " Acyclic service (transmission error)" "230" " Dialogue message is pending" "2789" " End of point reached" "1932" " Energy cut-off activated" "2004" " Energy cut-off deactivated" "3155" " External automatic ready" "2284" " Ghost mode activated" "782" " Ghost operation permitted" "332" " Operating mode test 1" "61" " Override_MAX" "377" " Primary home position" "1383" " Record coincidence" "1815" " Robot on path" "3330" " Robot waiting for PLC input" "3305" " Robot waits for peripheral input" "1900" " Servise position HOME3" "2862" " Special pos. reached" "1640" "±" {a43db5a2-c8f5-4820-ab71-e23cd042c3de} {00f755ba-8cfa-490a-adeb-7dcee0d65ff4} {8e07c43e-4038-43c1-84a7-73addfc0f2b6} System.Collections.ArrayList {63784cbb-9ba0-45e6-9d69-babf3f040511} System.Guid System.String {53da1be7-ad25-47c3-b0e8-e26286dad2e0}