444 lines
12 KiB
XML
444 lines
12 KiB
XML
<?xml version="1.0" encoding="utf-8"?>
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<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4026.13">
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<POU Name="ALIGNER_MAIN_FB" Id="{776bb155-78b6-4cd1-a38b-c250c1e10738}" SpecialFunc="None">
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<Declaration><![CDATA[FUNCTION_BLOCK ALIGNER_MAIN_FB EXTENDS Station_GENERAL_MAIN_FB IMPLEMENTS I_STATION_CMD_CALL
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VAR_INPUT
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IO : ALIGNER_IO_FB;
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bCalibration : BOOL;
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END_VAR
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VAR_OUTPUT
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Center : sPoint;
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Diameter : LREAL;
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Roundness : LREAL;
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END_VAR
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VAR
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TMX_5000 : TMX_5000_FB;
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XAxis : AXIS_FB;
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YAxis : AXIS_FB;
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Config : sAlignerConfig;
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ConfigOld : sAlignerConfig;
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XAxis_DefaultPosition : LREAL;
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END_VAR]]></Declaration>
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<Implementation>
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<ST><![CDATA[]]></ST>
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</Implementation>
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<Method Name="CloseInOut" Id="{a0336e32-2f81-4f51-b564-9eda8a3acf8b}">
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<Declaration><![CDATA[METHOD CloseInOut : BOOL
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VAR_INST
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GripperSize : INT;
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END_VAR]]></Declaration>
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<Implementation>
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<ST><![CDATA[CASE _Step OF
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0:
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GripperSize := ROBOT_MAIN.GetGripperSize(iStationStatus.WaferInfo[0].Size);
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CASE iCMD OF
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CloseInCMD:
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_Step := 10;
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CloseOutCMD:
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_Step := 50;
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END_CASE
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10:
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Center.X := 0;
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Center.Y := 0;
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Diameter := 0;
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Roundness := 0;
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IF TMX_5000.ProgramChange(GripperSize) THEN
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_Step := 0;
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CloseInOut := TRUE;
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END_IF
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50:
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XAxis.rInTargetPosition := Config.RobotHandlingPosition[GripperSize].X;
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XAxis.rInTargetVelocity := Config.X_DefaultVelocity;
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YAxis.rInTargetPosition := Config.RobotHandlingPosition[GripperSize].Y;
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YAxis.rInTargetVelocity := Config.Y_DefaultVelocity;
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_Step := 60;
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60:
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IF XAxis.MoveAbsolute() AND YAxis.MoveAbsolute() THEN
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_Step := 0;
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CloseInOut := TRUE;
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END_IF
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END_CASE
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]]></ST>
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</Implementation>
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</Method>
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<Method Name="FB_Init" Id="{0eee1379-e597-4345-b84b-dc11d41915ec}">
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<Declaration><![CDATA[//FB_Init is always available implicitly and it is used primarily for initialization.
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//The return value is not evaluated. For a specific influence, you can also declare the
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//methods explicitly and provide additional code there with the standard initialization
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//code. You can evaluate the return value.
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METHOD FB_Init: BOOL
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VAR_INPUT
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bInitRetains: BOOL; // TRUE: the retain variables are initialized (reset warm / reset cold)
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bInCopyCode: BOOL; // TRUE: the instance will be copied to the copy code afterward (online change)
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END_VAR]]></Declaration>
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<Implementation>
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<ST><![CDATA[_DataLogger := TRUE;
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_VisuName := 'ALIGNER';
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_SchedulerManagement := TRUE;
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_ManualSizeSelectionAvailable := TRUE;]]></ST>
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</Implementation>
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</Method>
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<Method Name="INIT" Id="{6a26cf46-6760-4e2a-968a-62bc5a2d5c0d}">
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<Declaration><![CDATA[METHOD INIT : BOOL
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]]></Declaration>
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<Implementation>
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<ST><![CDATA[CASE _Step OF
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0:
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IF TMX_5000.RunMode(TRUE) THEN
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XAxis.bOutInitDone := FALSE;
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YAxis.bOutInitDone := FALSE;
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_Step := 10;
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END_IF
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10:
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IO.ChuckVacuum.Up(TRUE);
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IF NOT XAxis.bOutInitDone THEN
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XAxis.Init();
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END_IF
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IF NOT YAxis.bOutInitDone THEN
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YAxis.Init();
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END_IF
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IF XAxis.bOutInitDone AND YAxis.bOutInitDone THEN
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_Step := 20;
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END_IF
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20:
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XAxis.rInTargetPosition := 0;
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XAxis.rInTargetVelocity := Config.X_DefaultVelocity;
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YAxis.rInTargetPosition := 0;
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YAxis.rInTargetVelocity := Config.Y_DefaultVelocity;
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IF XAxis.MoveAbsolute() AND YAxis.MoveAbsolute() THEN
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_Step := 30;
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END_IF
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30:
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IF IO.ChuckVacuum.bInUp THEN
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iStationStatus.WaferInfo[0].Number := 100;
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ELSE
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IO.ChuckVacuum.Down(TRUE);
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END_IF
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_Step := 0;
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INIT := TRUE;
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END_CASE]]></ST>
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</Implementation>
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</Method>
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<Method Name="Initialization" Id="{25efd6e4-2ecd-4902-81d2-339bdb708353}">
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<Declaration><![CDATA[METHOD Initialization : BOOL
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VAR_INPUT
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iStation : INT;
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END_VAR
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]]></Declaration>
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<Implementation>
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<ST><![CDATA[InitializationExt(iStation);
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iStationStatus.NoScan := TRUE;
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iStationStatus.NoRecipe := TRUE;
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IO.Initialization(iStation);
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iStationStatus.StationName := 'Aligner';
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RecipeStationName[iStation] := 'Aligner';
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iStationStatus.ErrorList := 'ALIGNER_ErrorNr';
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ConfigManagement.Initialization(ADR(Config), ADR(ConfigOld), SIZEOF(Config), 'sAlignerConfig', 'Aligner');
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ConfigPlausibility REF= Config.ConfigPlausibility;
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TMX_5000.Initialization(iStation);
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{region "X Axis"}
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XAxis.Config.sInName := 'X';
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XAxis.Config.DeviceID := 1;
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XAxis.Config.sInPositionUnit := 'mm';
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XAxis.Config.sInVelocityUnit := 'mm/s';
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XAxis.Config.sInAccelerationUnit := 'mm/s²';
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XAxis.Config.rInMinPosition := -10;
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XAxis.Config.rInMaxPosition := 10;
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XAxis.Config.rInMaxVelocity := 10;
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XAxis.Config.rInMinVelocity := 0.1;
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XAxis.Config.rInMaxAcceleration := 50;
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XAxis.Config.rInMinAcceleration := 0.1;
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XAxis.Config.bInNoEncoder := TRUE;
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XAxis.Config.bInRelativeEncoder := TRUE;
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XAxis.Config.bInService := TRUE;
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XAxis.Config.rInOffset REF= Config.X_Offset;
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XAxis.Config.rInDefaultPosition REF= XAxis_DefaultPosition;
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XAxis.Config.rInDefaultVelocity REF= Config.X_DefaultVelocity;
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XAxis.Initialization(iStation);
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XAxis.bInEnablePositive := TRUE;
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XAxis.bInEnableNegative := TRUE;
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{endregion}
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{region "Y Axis"}
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YAxis.Config.sInName := 'Y';
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YAxis.Config.DeviceID := 2;
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YAxis.Config.sInPositionUnit := 'mm';
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YAxis.Config.sInVelocityUnit := 'mm/s';
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YAxis.Config.sInAccelerationUnit := 'mm/s²';
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YAxis.Config.rInMinPosition := -10;
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YAxis.Config.rInMaxPosition := 10;
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YAxis.Config.rInMaxVelocity := 10;
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YAxis.Config.rInMinVelocity := 0.1;
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YAxis.Config.rInMaxAcceleration := 50;
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YAxis.Config.rInMinAcceleration := 0.1;
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YAxis.Config.bInNoEncoder := TRUE;
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YAxis.Config.bInRelativeEncoder := TRUE;
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YAxis.Config.bInService := TRUE;
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YAxis.Config.rInOffset REF= Config.Y_Offset;
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YAxis.Config.rInDefaultPosition REF= XAxis_DefaultPosition;
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YAxis.Config.rInDefaultVelocity REF= Config.Y_DefaultVelocity;
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YAxis.Initialization(iStation);
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YAxis.bInEnablePositive := TRUE;
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YAxis.bInEnableNegative := TRUE;
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{endregion}
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ConfigManagement.FileName := 'Aligner';
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DataLogger.format := '%0.3f;%0.3f;%0.3f;%0.3f;$N';
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DataLogger.Data[1].Name := 'X (mm)';
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DataLogger.Data[1].Value REF= Center.X;
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DataLogger.Data[1].Tolerence := 0.01;
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DataLogger.Data[2].Name := 'Y (mm)';
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DataLogger.Data[2].Value REF= Center.Y;
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DataLogger.Data[2].Tolerence := 0.001;
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DataLogger.Data[3].Name := 'Diameter (mm)';
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DataLogger.Data[3].Value REF= Diameter;
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DataLogger.Data[3].Tolerence := 0.1;
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DataLogger.Data[4].Name := 'Roundness (mm)';
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DataLogger.Data[4].Value REF= Roundness;
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DataLogger.Data[4].Tolerence := 0.1;]]></ST>
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</Implementation>
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</Method>
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<Method Name="MAIN" Id="{9cf7526a-d13d-4844-b4ad-6d8c783ce101}">
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<Declaration><![CDATA[METHOD MAIN : BOOL
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VAR_INPUT
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END_VAR
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]]></Declaration>
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<Implementation>
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<ST><![CDATA[IO();
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XAxis();
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YAxis();
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TMX_5000();]]></ST>
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</Implementation>
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</Method>
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<Method Name="PrepInOut" Id="{0a96881a-2ba5-4bf7-8c73-d1adb06b73bf}">
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<Declaration><![CDATA[METHOD PrepInOut : BOOL
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VAR_INST
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GripperSize : USINT;
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END_VAR]]></Declaration>
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<Implementation>
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<ST><![CDATA[CASE _Step OF
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0:
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CASE iCMD OF
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PrepInCMD:
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_Step := 10;
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PrepOutCMD:
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PrepInOut := TRUE;
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END_CASE
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10:
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GripperSize := ROBOT_MAIN.GetGripperSize(iStationStatus.WaferInfo[0].Size);
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XAxis.rInTargetPosition := Config.RobotHandlingPosition[GripperSize].X;
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XAxis.rInTargetVelocity := Config.X_DefaultVelocity;
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YAxis.rInTargetPosition := Config.RobotHandlingPosition[GripperSize].Y;
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YAxis.rInTargetVelocity := Config.Y_DefaultVelocity;
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_Step := 20;
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20:
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IF XAxis.MoveAbsolute() AND YAxis.MoveAbsolute() THEN
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_Step := 0;
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PrepInOut := TRUE;
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END_IF
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END_CASE]]></ST>
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</Implementation>
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</Method>
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<Method Name="SetCalibration" Id="{711e4cb2-8003-42e7-a4d8-c18dc3d54615}">
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<Declaration><![CDATA[METHOD SetCalibration
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VAR_INPUT
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TargetStation : INT;
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TargetSize : INT;
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TargetPaddle : INT;
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Center : sPoint;
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END_VAR
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]]></Declaration>
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<Implementation>
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<ST><![CDATA[Config.CalibrationPosition[TargetStation][TargetSize][TargetPaddle] := Center;
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ConfigManagement.CMD := eConfigCMD.Save;]]></ST>
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</Implementation>
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</Method>
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<Method Name="Start" Id="{f2375d07-415a-4633-9dd2-e516d604a136}">
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<Declaration><![CDATA[METHOD Start : BOOL
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VAR
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In : ARRAY[0..7] OF DINT;
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i : INT;
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END_VAR
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VAR_INST
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RefPoint : sPoint;
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CassetteNumber : INT;
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NextProcess : INT;
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TargetEtcher : INT;
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END_VAR]]></Declaration>
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<Implementation>
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<ST><![CDATA[CASE _Step OF
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0:
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FOR i := 0 TO 7 DO
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In[i] := UDINT_TO_DINT(TMX_5000.rInResult[i+7]);
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END_FOR
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Diameter := In[0];
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Diameter := Diameter;
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Diameter := Diameter /1000;
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IF NOT ROBOT_MAIN.CheckDiameter(Diameter, iStationStatus.WaferInfo[0].Size) THEN
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RETURN;
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END_IF
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Roundness := In[1];
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Roundness := Roundness/1000;
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Center.X := In[2];
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Center.X := Center.X/1000;
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IF ABS(Center.X) > 120 THEN
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RETURN;
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END_IF
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Center.Y := In[3];
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Center.Y := Center.Y/1000;
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IF bCalibration THEN
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bCalibration := FALSE;
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_Step := 100;
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ELSE
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_Step := 10;
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END_IF
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10:
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CASE CMD[FirstStation] OF
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StartCMD:
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CassetteNumber := iStationStatus.WaferInfo[0].CassetteNumber;
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NextProcess := iStationStatus.WaferInfo[0].FlowStepNumber +1;
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TargetEtcher := CASSETTE_PROCESS[CassetteNumber][iStationStatus.WaferInfo[0].Number][NextProcess].TargetStation;
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CASE TargetEtcher OF
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20,21:
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CASSETTE_PROCESS[CassetteNumber][iStationStatus.WaferInfo[0].Number][NextProcess].Alternative[1] := TargetEtcher;
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CASSETTE_PROCESS[CassetteNumber][iStationStatus.WaferInfo[0].Number][NextProcess].Alternative[2] := TargetEtcher;
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RefPoint := Config.CalibrationPosition[TargetEtcher][iStationStatus.WaferInfo[0].Size][0];
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ELSE
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RefPoint := Config.CalibrationPosition[FirstSpinner][iStationStatus.WaferInfo[0].Size][0];
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END_CASE
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ELSE
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RefPoint := Config.CalibrationPosition[FirstSpinner][iStationStatus.WaferInfo[0].Size][0];
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END_CASE
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_Step := 20;
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20:
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FOR i := 0 TO 7 DO
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In[i] := UDINT_TO_DINT(TMX_5000.rInResult[i+7]);
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END_FOR
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Center.X := In[2];
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Center.X := Center.X/1000;
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Center.Y := In[3];
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Center.Y := Center.Y/1000;
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IF ABS(RefPoint.X - Center.X) > 0.001 THEN
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IF RefPoint.X < Center.X THEN
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YAxis.bInJogNegative := TRUE;
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YAxis.bInJogPositive := FALSE;
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YAxis.rInTargetVelocity := ABS(RefPoint.X - Center.X);
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ELSIF RefPoint.X > Center.X THEN
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YAxis.bInJogNegative := FALSE;
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YAxis.bInJogPositive := TRUE;
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YAxis.rInTargetVelocity := ABS(RefPoint.X - Center.X);
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ELSE
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YAxis.bInJogNegative := FALSE;
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YAxis.bInJogPositive := FALSE;
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END_IF
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END_IF
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IF ABS(RefPoint.Y - Center.Y) > 0.001 THEN
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IF RefPoint.Y < Center.Y THEN
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XAxis.bInJogNegative := TRUE;
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XAxis.bInJogPositive := FALSE;
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XAxis.rInTargetVelocity := ABS(RefPoint.Y - Center.Y);
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ELSIF RefPoint.Y > Center.Y THEN
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XAxis.bInJogNegative := FALSE;
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XAxis.bInJogPositive := TRUE;
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XAxis.rInTargetVelocity := ABS(RefPoint.Y - Center.Y);
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ELSE
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XAxis.bInJogNegative := FALSE;
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XAxis.bInJogPositive := FALSE;
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END_IF
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END_IF
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IF XAxis.rInTargetVelocity < 0.005 THEN
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XAxis.rInTargetVelocity := 0.005;
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END_IF
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IF YAxis.rInTargetVelocity < 0.005 THEN
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YAxis.rInTargetVelocity := 0.005;
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END_IF
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DelayTimer(IN := ABS(RefPoint.X - Center.X)<= 0.001 AND ABS(RefPoint.Y - Center.Y) <=0.001, PT := T#100MS);
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IF DelayTimer.Q THEN
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DelayTimer(IN := FALSE);
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YAxis.bInJogNegative := FALSE;
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YAxis.bInJogPositive := FALSE;
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XAxis.bInJogNegative := FALSE;
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XAxis.bInJogPositive := FALSE;
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XAxis.rInTargetVelocity := Config.X_DefaultVelocity;
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YAxis.rInTargetVelocity := Config.Y_DefaultVelocity;
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_Step := 30;
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END_IF
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30:
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_Step := 100;
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40:
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FOR i := 0 TO 7 DO
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In[i] := UDINT_TO_DINT(TMX_5000.rInResult[i+7]);
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END_FOR
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Center.X := In[2];
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Center.X := Center.X/1000;
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Center.Y := In[3];
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Center.Y := Center.Y/1000;
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100:
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_Step := 0;
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Start := TRUE;
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END_CASE
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]]></ST>
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</Implementation>
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</Method>
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</POU>
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</TcPlcObject> |